9/7/2010	11:31:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2010	11:31:23 AM	Recipe started at 11:31 AM
9/7/2010	11:31:23 AM	H2 valve closed
9/7/2010	11:31:23 AM	BCl3 valve closed
9/7/2010	11:31:23 AM	PH3 valve closed
9/7/2010	11:31:23 AM	SiCl4 pre valve closed
9/7/2010	11:31:23 AM	SiCl4 post valve closed
9/7/2010	11:31:23 AM	Main Vac valve closed
9/7/2010	11:31:23 AM	Bypass valve closed
9/7/2010	11:31:23 AM	Bubbler valve closed
9/7/2010	11:31:23 AM	Helium valve opened
9/7/2010	11:31:23 AM	Helium MFC set to  500.000000
9/7/2010	11:31:23 AM	H2 MFC set to  0.000000
9/7/2010	11:31:23 AM	BCl3 MFC set to  0.000000
9/7/2010	11:31:23 AM	PHl3 MFC set to  0.000000
9/7/2010	11:31:23 AM	SiCl4 MFC set to  0.000000
9/7/2010	11:31:23 AM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:31:23 AM	Tube furnace set to 0
9/7/2010	11:32:43 AM	Helium valve closed
9/7/2010	11:32:43 AM	H2 valve closed
9/7/2010	11:32:43 AM	BCl3 valve closed
9/7/2010	11:32:43 AM	PH3 valve closed
9/7/2010	11:32:43 AM	SiCl4 pre valve closed
9/7/2010	11:32:43 AM	SiCl4 post valve closed
9/7/2010	11:32:43 AM	Main Vac valve closed
9/7/2010	11:32:43 AM	Bypass valve closed
9/7/2010	11:32:43 AM	Bubbler valve closed
9/7/2010	11:32:43 AM	Helium MFC set to  0.000000
9/7/2010	11:32:43 AM	H2 MFC set to  0.000000
9/7/2010	11:32:43 AM	BCl3 MFC set to  0.000000
9/7/2010	11:32:43 AM	PHl3 MFC set to  0.000000
9/7/2010	11:32:43 AM	SiCl4 MFC set to  0.000000
9/7/2010	11:32:43 AM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:32:43 AM	Tube furnace set to 0
9/7/2010	11:32:43 AM	Run finished at 11:32 AM
9/7/2010	11:32:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2010	11:59:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2010	11:59:57 AM	Recipe started at 11:59 AM
9/7/2010	11:59:57 AM	Helium valve closed
9/7/2010	11:59:57 AM	H2 valve closed
9/7/2010	11:59:57 AM	BCl3 valve closed
9/7/2010	11:59:57 AM	PH3 valve closed
9/7/2010	11:59:57 AM	SiCl4 pre valve closed
9/7/2010	11:59:57 AM	SiCl4 post valve closed
9/7/2010	11:59:57 AM	Main Vac valve closed
9/7/2010	11:59:57 AM	Bubbler valve closed
9/7/2010	11:59:57 AM	Bypass valve opened
9/7/2010	11:59:57 AM	Helium MFC set to  0.000000
9/7/2010	11:59:57 AM	H2 MFC set to  0.000000
9/7/2010	11:59:57 AM	BCl3 MFC set to  0.000000
9/7/2010	11:59:57 AM	PHl3 MFC set to  0.000000
9/7/2010	11:59:57 AM	SiCl4 MFC set to  0.000000
9/7/2010	11:59:57 AM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:59:57 AM	Tube furnace set to 0
9/7/2010	12:00:37 PM	Helium valve closed
9/7/2010	12:00:37 PM	H2 valve closed
9/7/2010	12:00:37 PM	BCl3 valve closed
9/7/2010	12:00:37 PM	PH3 valve closed
9/7/2010	12:00:37 PM	SiCl4 pre valve closed
9/7/2010	12:00:37 PM	SiCl4 post valve closed
9/7/2010	12:00:37 PM	Bubbler valve closed
9/7/2010	12:00:37 PM	Main Vac valve opened
9/7/2010	12:00:37 PM	Bypass valve opened
9/7/2010	12:00:37 PM	Helium MFC set to  0.000000
9/7/2010	12:00:37 PM	H2 MFC set to  0.000000
9/7/2010	12:00:37 PM	BCl3 MFC set to  0.000000
9/7/2010	12:00:37 PM	PHl3 MFC set to  0.000000
9/7/2010	12:00:37 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:00:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:00:38 PM	Tube furnace set to 0
9/7/2010	12:00:38 PM	Run finished at 12:00 PM
9/7/2010	12:00:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/7/2010	12:01:04 PM	Recipe started at 12:00 PM
9/7/2010	12:01:04 PM	Helium valve closed
9/7/2010	12:01:04 PM	H2 valve closed
9/7/2010	12:01:04 PM	BCl3 valve closed
9/7/2010	12:01:04 PM	PH3 valve closed
9/7/2010	12:01:04 PM	SiCl4 pre valve closed
9/7/2010	12:01:04 PM	SiCl4 post valve closed
9/7/2010	12:01:04 PM	Main Vac valve closed
9/7/2010	12:01:04 PM	Bubbler valve closed
9/7/2010	12:01:04 PM	Bypass valve opened
9/7/2010	12:01:04 PM	Helium MFC set to  0.000000
9/7/2010	12:01:04 PM	H2 MFC set to  0.000000
9/7/2010	12:01:04 PM	BCl3 MFC set to  0.000000
9/7/2010	12:01:04 PM	PHl3 MFC set to  0.000000
9/7/2010	12:01:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:01:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:01:04 PM	Tube furnace set to 0
9/7/2010	12:01:05 PM	Helium valve closed
9/7/2010	12:01:05 PM	H2 valve closed
9/7/2010	12:01:05 PM	BCl3 valve closed
9/7/2010	12:01:05 PM	PH3 valve closed
9/7/2010	12:01:05 PM	SiCl4 pre valve closed
9/7/2010	12:01:05 PM	SiCl4 post valve closed
9/7/2010	12:01:05 PM	Bubbler valve closed
9/7/2010	12:01:05 PM	Main Vac valve opened
9/7/2010	12:01:05 PM	Bypass valve opened
9/7/2010	12:01:05 PM	Helium MFC set to  0.000000
9/7/2010	12:01:05 PM	H2 MFC set to  0.000000
9/7/2010	12:01:05 PM	BCl3 MFC set to  0.000000
9/7/2010	12:01:05 PM	PHl3 MFC set to  0.000000
9/7/2010	12:01:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:01:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:01:05 PM	Tube furnace set to 0
9/7/2010	12:02:05 PM	H2 valve closed
9/7/2010	12:02:05 PM	BCl3 valve closed
9/7/2010	12:02:05 PM	PH3 valve closed
9/7/2010	12:02:05 PM	SiCl4 pre valve closed
9/7/2010	12:02:05 PM	SiCl4 post valve closed
9/7/2010	12:02:05 PM	Bubbler valve closed
9/7/2010	12:02:05 PM	Helium valve opened
9/7/2010	12:02:05 PM	Main Vac valve opened
9/7/2010	12:02:05 PM	Bypass valve opened
9/7/2010	12:02:05 PM	Helium MFC set to  100.000000
9/7/2010	12:02:05 PM	H2 MFC set to  0.000000
9/7/2010	12:02:05 PM	BCl3 MFC set to  0.000000
9/7/2010	12:02:05 PM	PHl3 MFC set to  0.000000
9/7/2010	12:02:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:02:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:02:05 PM	Tube furnace set to 0
9/7/2010	12:03:05 PM	Helium valve closed
9/7/2010	12:03:05 PM	H2 valve closed
9/7/2010	12:03:05 PM	BCl3 valve closed
9/7/2010	12:03:05 PM	PH3 valve closed
9/7/2010	12:03:05 PM	SiCl4 pre valve closed
9/7/2010	12:03:05 PM	SiCl4 post valve closed
9/7/2010	12:03:05 PM	Bubbler valve closed
9/7/2010	12:03:05 PM	Main Vac valve opened
9/7/2010	12:03:05 PM	Bypass valve opened
9/7/2010	12:03:05 PM	Helium MFC set to  0.000000
9/7/2010	12:03:05 PM	H2 MFC set to  0.000000
9/7/2010	12:03:05 PM	BCl3 MFC set to  0.000000
9/7/2010	12:03:05 PM	PHl3 MFC set to  0.000000
9/7/2010	12:03:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:03:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:03:05 PM	Tube furnace set to 0
9/7/2010	12:04:05 PM	H2 valve closed
9/7/2010	12:04:05 PM	BCl3 valve closed
9/7/2010	12:04:05 PM	PH3 valve closed
9/7/2010	12:04:05 PM	SiCl4 pre valve closed
9/7/2010	12:04:05 PM	SiCl4 post valve closed
9/7/2010	12:04:05 PM	Bubbler valve closed
9/7/2010	12:04:05 PM	Helium valve opened
9/7/2010	12:04:05 PM	Main Vac valve opened
9/7/2010	12:04:05 PM	Bypass valve opened
9/7/2010	12:04:05 PM	Helium MFC set to  100.000000
9/7/2010	12:04:05 PM	H2 MFC set to  0.000000
9/7/2010	12:04:05 PM	BCl3 MFC set to  0.000000
9/7/2010	12:04:05 PM	PHl3 MFC set to  0.000000
9/7/2010	12:04:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:04:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:04:05 PM	Tube furnace set to 0
9/7/2010	12:05:05 PM	Helium valve closed
9/7/2010	12:05:05 PM	H2 valve closed
9/7/2010	12:05:05 PM	BCl3 valve closed
9/7/2010	12:05:05 PM	PH3 valve closed
9/7/2010	12:05:05 PM	SiCl4 pre valve closed
9/7/2010	12:05:05 PM	SiCl4 post valve closed
9/7/2010	12:05:05 PM	Bubbler valve closed
9/7/2010	12:05:05 PM	Main Vac valve opened
9/7/2010	12:05:05 PM	Bypass valve opened
9/7/2010	12:05:05 PM	Helium MFC set to  0.000000
9/7/2010	12:05:05 PM	H2 MFC set to  0.000000
9/7/2010	12:05:05 PM	BCl3 MFC set to  0.000000
9/7/2010	12:05:05 PM	PHl3 MFC set to  0.000000
9/7/2010	12:05:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:05:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:05:06 PM	Tube furnace set to 0
9/7/2010	12:06:06 PM	H2 valve closed
9/7/2010	12:06:06 PM	BCl3 valve closed
9/7/2010	12:06:06 PM	PH3 valve closed
9/7/2010	12:06:06 PM	SiCl4 pre valve closed
9/7/2010	12:06:06 PM	SiCl4 post valve closed
9/7/2010	12:06:06 PM	Bubbler valve closed
9/7/2010	12:06:06 PM	Helium valve opened
9/7/2010	12:06:06 PM	Main Vac valve opened
9/7/2010	12:06:06 PM	Bypass valve opened
9/7/2010	12:06:06 PM	Helium MFC set to  100.000000
9/7/2010	12:06:06 PM	H2 MFC set to  0.000000
9/7/2010	12:06:06 PM	BCl3 MFC set to  0.000000
9/7/2010	12:06:06 PM	PHl3 MFC set to  0.000000
9/7/2010	12:06:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:06:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:06:06 PM	Tube furnace set to 0
9/7/2010	12:07:06 PM	Helium valve closed
9/7/2010	12:07:06 PM	H2 valve closed
9/7/2010	12:07:06 PM	BCl3 valve closed
9/7/2010	12:07:06 PM	PH3 valve closed
9/7/2010	12:07:06 PM	SiCl4 pre valve closed
9/7/2010	12:07:06 PM	SiCl4 post valve closed
9/7/2010	12:07:06 PM	Bubbler valve closed
9/7/2010	12:07:06 PM	Main Vac valve opened
9/7/2010	12:07:06 PM	Bypass valve opened
9/7/2010	12:07:06 PM	Helium MFC set to  0.000000
9/7/2010	12:07:06 PM	H2 MFC set to  0.000000
9/7/2010	12:07:06 PM	BCl3 MFC set to  0.000000
9/7/2010	12:07:06 PM	PHl3 MFC set to  0.000000
9/7/2010	12:07:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:07:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:07:06 PM	Tube furnace set to 0
9/7/2010	12:08:06 PM	H2 valve closed
9/7/2010	12:08:06 PM	BCl3 valve closed
9/7/2010	12:08:06 PM	PH3 valve closed
9/7/2010	12:08:06 PM	SiCl4 pre valve closed
9/7/2010	12:08:06 PM	SiCl4 post valve closed
9/7/2010	12:08:06 PM	Bubbler valve closed
9/7/2010	12:08:06 PM	Helium valve opened
9/7/2010	12:08:06 PM	Main Vac valve opened
9/7/2010	12:08:06 PM	Bypass valve opened
9/7/2010	12:08:06 PM	Helium MFC set to  100.000000
9/7/2010	12:08:06 PM	H2 MFC set to  0.000000
9/7/2010	12:08:06 PM	BCl3 MFC set to  0.000000
9/7/2010	12:08:06 PM	PHl3 MFC set to  0.000000
9/7/2010	12:08:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:08:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:08:06 PM	Tube furnace set to 0
9/7/2010	12:09:06 PM	Helium valve closed
9/7/2010	12:09:06 PM	H2 valve closed
9/7/2010	12:09:06 PM	BCl3 valve closed
9/7/2010	12:09:06 PM	PH3 valve closed
9/7/2010	12:09:06 PM	SiCl4 pre valve closed
9/7/2010	12:09:06 PM	SiCl4 post valve closed
9/7/2010	12:09:06 PM	Bubbler valve closed
9/7/2010	12:09:06 PM	Main Vac valve opened
9/7/2010	12:09:06 PM	Bypass valve opened
9/7/2010	12:09:06 PM	Helium MFC set to  0.000000
9/7/2010	12:09:06 PM	H2 MFC set to  0.000000
9/7/2010	12:09:06 PM	BCl3 MFC set to  0.000000
9/7/2010	12:09:06 PM	PHl3 MFC set to  0.000000
9/7/2010	12:09:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:09:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:09:06 PM	Tube furnace set to 0
9/7/2010	12:10:06 PM	H2 valve closed
9/7/2010	12:10:06 PM	BCl3 valve closed
9/7/2010	12:10:06 PM	PH3 valve closed
9/7/2010	12:10:06 PM	SiCl4 pre valve closed
9/7/2010	12:10:06 PM	SiCl4 post valve closed
9/7/2010	12:10:06 PM	Bubbler valve closed
9/7/2010	12:10:06 PM	Helium valve opened
9/7/2010	12:10:06 PM	Main Vac valve opened
9/7/2010	12:10:06 PM	Bypass valve opened
9/7/2010	12:10:06 PM	Helium MFC set to  100.000000
9/7/2010	12:10:06 PM	H2 MFC set to  0.000000
9/7/2010	12:10:06 PM	BCl3 MFC set to  0.000000
9/7/2010	12:10:06 PM	PHl3 MFC set to  0.000000
9/7/2010	12:10:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:10:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:10:07 PM	Tube furnace set to 0
9/7/2010	12:11:07 PM	Helium valve closed
9/7/2010	12:11:07 PM	H2 valve closed
9/7/2010	12:11:07 PM	BCl3 valve closed
9/7/2010	12:11:07 PM	PH3 valve closed
9/7/2010	12:11:07 PM	SiCl4 pre valve closed
9/7/2010	12:11:07 PM	SiCl4 post valve closed
9/7/2010	12:11:07 PM	Bubbler valve closed
9/7/2010	12:11:07 PM	Main Vac valve opened
9/7/2010	12:11:07 PM	Bypass valve opened
9/7/2010	12:11:07 PM	Helium MFC set to  0.000000
9/7/2010	12:11:07 PM	H2 MFC set to  0.000000
9/7/2010	12:11:07 PM	BCl3 MFC set to  0.000000
9/7/2010	12:11:07 PM	PHl3 MFC set to  0.000000
9/7/2010	12:11:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:11:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:11:07 PM	Tube furnace set to 0
9/7/2010	12:12:07 PM	H2 valve closed
9/7/2010	12:12:07 PM	BCl3 valve closed
9/7/2010	12:12:07 PM	PH3 valve closed
9/7/2010	12:12:07 PM	SiCl4 pre valve closed
9/7/2010	12:12:07 PM	SiCl4 post valve closed
9/7/2010	12:12:07 PM	Bubbler valve closed
9/7/2010	12:12:07 PM	Helium valve opened
9/7/2010	12:12:07 PM	Main Vac valve opened
9/7/2010	12:12:07 PM	Bypass valve opened
9/7/2010	12:12:07 PM	Helium MFC set to  100.000000
9/7/2010	12:12:07 PM	H2 MFC set to  0.000000
9/7/2010	12:12:07 PM	BCl3 MFC set to  0.000000
9/7/2010	12:12:07 PM	PHl3 MFC set to  0.000000
9/7/2010	12:12:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:12:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:12:07 PM	Tube furnace set to 0
9/7/2010	12:13:07 PM	Helium valve closed
9/7/2010	12:13:07 PM	H2 valve closed
9/7/2010	12:13:07 PM	BCl3 valve closed
9/7/2010	12:13:07 PM	PH3 valve closed
9/7/2010	12:13:07 PM	SiCl4 pre valve closed
9/7/2010	12:13:07 PM	SiCl4 post valve closed
9/7/2010	12:13:07 PM	Bubbler valve closed
9/7/2010	12:13:07 PM	Main Vac valve opened
9/7/2010	12:13:07 PM	Bypass valve opened
9/7/2010	12:13:07 PM	Helium MFC set to  0.000000
9/7/2010	12:13:07 PM	H2 MFC set to  0.000000
9/7/2010	12:13:07 PM	BCl3 MFC set to  0.000000
9/7/2010	12:13:07 PM	PHl3 MFC set to  0.000000
9/7/2010	12:13:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:13:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:13:07 PM	Tube furnace set to 0
9/7/2010	12:14:07 PM	H2 valve closed
9/7/2010	12:14:07 PM	BCl3 valve closed
9/7/2010	12:14:07 PM	PH3 valve closed
9/7/2010	12:14:07 PM	SiCl4 pre valve closed
9/7/2010	12:14:07 PM	SiCl4 post valve closed
9/7/2010	12:14:07 PM	Bubbler valve closed
9/7/2010	12:14:07 PM	Helium valve opened
9/7/2010	12:14:07 PM	Main Vac valve opened
9/7/2010	12:14:07 PM	Bypass valve opened
9/7/2010	12:14:07 PM	Helium MFC set to  100.000000
9/7/2010	12:14:07 PM	H2 MFC set to  0.000000
9/7/2010	12:14:07 PM	BCl3 MFC set to  0.000000
9/7/2010	12:14:07 PM	PHl3 MFC set to  0.000000
9/7/2010	12:14:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:14:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:14:07 PM	Tube furnace set to 0
9/7/2010	12:15:07 PM	Helium valve closed
9/7/2010	12:15:07 PM	H2 valve closed
9/7/2010	12:15:07 PM	BCl3 valve closed
9/7/2010	12:15:07 PM	PH3 valve closed
9/7/2010	12:15:07 PM	SiCl4 pre valve closed
9/7/2010	12:15:07 PM	SiCl4 post valve closed
9/7/2010	12:15:07 PM	Bubbler valve closed
9/7/2010	12:15:07 PM	Main Vac valve opened
9/7/2010	12:15:07 PM	Bypass valve opened
9/7/2010	12:15:07 PM	Helium MFC set to  0.000000
9/7/2010	12:15:07 PM	H2 MFC set to  0.000000
9/7/2010	12:15:07 PM	BCl3 MFC set to  0.000000
9/7/2010	12:15:07 PM	PHl3 MFC set to  0.000000
9/7/2010	12:15:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:15:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:15:08 PM	Tube furnace set to 0
9/7/2010	12:16:08 PM	H2 valve closed
9/7/2010	12:16:08 PM	BCl3 valve closed
9/7/2010	12:16:08 PM	PH3 valve closed
9/7/2010	12:16:08 PM	SiCl4 pre valve closed
9/7/2010	12:16:08 PM	SiCl4 post valve closed
9/7/2010	12:16:08 PM	Bubbler valve closed
9/7/2010	12:16:08 PM	Helium valve opened
9/7/2010	12:16:08 PM	Main Vac valve opened
9/7/2010	12:16:08 PM	Bypass valve opened
9/7/2010	12:16:08 PM	Helium MFC set to  100.000000
9/7/2010	12:16:08 PM	H2 MFC set to  0.000000
9/7/2010	12:16:08 PM	BCl3 MFC set to  0.000000
9/7/2010	12:16:08 PM	PHl3 MFC set to  0.000000
9/7/2010	12:16:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:16:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:16:08 PM	Tube furnace set to 0
9/7/2010	12:17:08 PM	Helium valve closed
9/7/2010	12:17:08 PM	H2 valve closed
9/7/2010	12:17:08 PM	BCl3 valve closed
9/7/2010	12:17:08 PM	PH3 valve closed
9/7/2010	12:17:08 PM	SiCl4 pre valve closed
9/7/2010	12:17:08 PM	SiCl4 post valve closed
9/7/2010	12:17:08 PM	Bubbler valve closed
9/7/2010	12:17:08 PM	Main Vac valve opened
9/7/2010	12:17:08 PM	Bypass valve opened
9/7/2010	12:17:08 PM	Helium MFC set to  0.000000
9/7/2010	12:17:08 PM	H2 MFC set to  0.000000
9/7/2010	12:17:08 PM	BCl3 MFC set to  0.000000
9/7/2010	12:17:08 PM	PHl3 MFC set to  0.000000
9/7/2010	12:17:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:17:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:17:08 PM	Tube furnace set to 0
9/7/2010	12:18:08 PM	H2 valve closed
9/7/2010	12:18:08 PM	BCl3 valve closed
9/7/2010	12:18:08 PM	PH3 valve closed
9/7/2010	12:18:08 PM	SiCl4 pre valve closed
9/7/2010	12:18:08 PM	SiCl4 post valve closed
9/7/2010	12:18:08 PM	Bubbler valve closed
9/7/2010	12:18:08 PM	Helium valve opened
9/7/2010	12:18:08 PM	Main Vac valve opened
9/7/2010	12:18:08 PM	Bypass valve opened
9/7/2010	12:18:08 PM	Helium MFC set to  100.000000
9/7/2010	12:18:08 PM	H2 MFC set to  0.000000
9/7/2010	12:18:08 PM	BCl3 MFC set to  0.000000
9/7/2010	12:18:08 PM	PHl3 MFC set to  0.000000
9/7/2010	12:18:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:18:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:18:08 PM	Tube furnace set to 0
9/7/2010	12:19:08 PM	Helium valve closed
9/7/2010	12:19:08 PM	H2 valve closed
9/7/2010	12:19:08 PM	BCl3 valve closed
9/7/2010	12:19:08 PM	PH3 valve closed
9/7/2010	12:19:08 PM	SiCl4 pre valve closed
9/7/2010	12:19:08 PM	SiCl4 post valve closed
9/7/2010	12:19:08 PM	Bubbler valve closed
9/7/2010	12:19:08 PM	Main Vac valve opened
9/7/2010	12:19:08 PM	Bypass valve opened
9/7/2010	12:19:08 PM	Helium MFC set to  0.000000
9/7/2010	12:19:08 PM	H2 MFC set to  0.000000
9/7/2010	12:19:08 PM	BCl3 MFC set to  0.000000
9/7/2010	12:19:08 PM	PHl3 MFC set to  0.000000
9/7/2010	12:19:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:19:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:19:08 PM	Tube furnace set to 0
9/7/2010	12:20:08 PM	H2 valve closed
9/7/2010	12:20:08 PM	BCl3 valve closed
9/7/2010	12:20:08 PM	PH3 valve closed
9/7/2010	12:20:08 PM	SiCl4 pre valve closed
9/7/2010	12:20:08 PM	SiCl4 post valve closed
9/7/2010	12:20:08 PM	Bubbler valve closed
9/7/2010	12:20:08 PM	Helium valve opened
9/7/2010	12:20:08 PM	Main Vac valve opened
9/7/2010	12:20:08 PM	Bypass valve opened
9/7/2010	12:20:08 PM	Helium MFC set to  100.000000
9/7/2010	12:20:08 PM	H2 MFC set to  0.000000
9/7/2010	12:20:08 PM	BCl3 MFC set to  0.000000
9/7/2010	12:20:08 PM	PHl3 MFC set to  0.000000
9/7/2010	12:20:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:20:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:20:09 PM	Tube furnace set to 0
9/7/2010	12:21:09 PM	Helium valve closed
9/7/2010	12:21:09 PM	H2 valve closed
9/7/2010	12:21:09 PM	BCl3 valve closed
9/7/2010	12:21:09 PM	PH3 valve closed
9/7/2010	12:21:09 PM	SiCl4 pre valve closed
9/7/2010	12:21:09 PM	SiCl4 post valve closed
9/7/2010	12:21:09 PM	Bubbler valve closed
9/7/2010	12:21:09 PM	Main Vac valve opened
9/7/2010	12:21:09 PM	Bypass valve opened
9/7/2010	12:21:09 PM	Helium MFC set to  0.000000
9/7/2010	12:21:09 PM	H2 MFC set to  0.000000
9/7/2010	12:21:09 PM	BCl3 MFC set to  0.000000
9/7/2010	12:21:09 PM	PHl3 MFC set to  0.000000
9/7/2010	12:21:09 PM	SiCl4 MFC set to  0.000000
9/7/2010	12:21:09 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	12:21:09 PM	Tube furnace set to 100
9/7/2010	12:21:10 PM	Run finished at 12:21 PM
9/7/2010	1:04:04 PM	Recipe started at 1:03 PM
9/7/2010	1:04:04 PM	Helium valve closed
9/7/2010	1:04:04 PM	H2 valve closed
9/7/2010	1:04:04 PM	BCl3 valve closed
9/7/2010	1:04:04 PM	PH3 valve closed
9/7/2010	1:04:04 PM	SiCl4 pre valve closed
9/7/2010	1:04:04 PM	SiCl4 post valve closed
9/7/2010	1:04:04 PM	Main Vac valve closed
9/7/2010	1:04:04 PM	Bubbler valve closed
9/7/2010	1:04:04 PM	Bypass valve opened
9/7/2010	1:04:04 PM	Helium MFC set to  0.000000
9/7/2010	1:04:04 PM	H2 MFC set to  0.000000
9/7/2010	1:04:04 PM	BCl3 MFC set to  0.000000
9/7/2010	1:04:04 PM	PHl3 MFC set to  0.000000
9/7/2010	1:04:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:04:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:04:04 PM	Tube furnace set to 0
9/7/2010	1:04:04 PM	Helium valve closed
9/7/2010	1:04:04 PM	H2 valve closed
9/7/2010	1:04:04 PM	BCl3 valve closed
9/7/2010	1:04:04 PM	PH3 valve closed
9/7/2010	1:04:04 PM	SiCl4 pre valve closed
9/7/2010	1:04:04 PM	SiCl4 post valve closed
9/7/2010	1:04:04 PM	Bubbler valve closed
9/7/2010	1:04:04 PM	Main Vac valve opened
9/7/2010	1:04:04 PM	Bypass valve opened
9/7/2010	1:04:04 PM	Helium MFC set to  0.000000
9/7/2010	1:04:04 PM	H2 MFC set to  0.000000
9/7/2010	1:04:04 PM	BCl3 MFC set to  0.000000
9/7/2010	1:04:04 PM	PHl3 MFC set to  0.000000
9/7/2010	1:04:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:04:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:04:04 PM	Tube furnace set to 0
9/7/2010	1:04:36 PM	H2 valve closed
9/7/2010	1:04:36 PM	BCl3 valve closed
9/7/2010	1:04:36 PM	PH3 valve closed
9/7/2010	1:04:36 PM	SiCl4 pre valve closed
9/7/2010	1:04:36 PM	SiCl4 post valve closed
9/7/2010	1:04:36 PM	Bubbler valve closed
9/7/2010	1:04:36 PM	Helium valve opened
9/7/2010	1:04:36 PM	Main Vac valve opened
9/7/2010	1:04:36 PM	Bypass valve opened
9/7/2010	1:04:36 PM	Helium MFC set to  100.000000
9/7/2010	1:04:36 PM	H2 MFC set to  0.000000
9/7/2010	1:04:36 PM	BCl3 MFC set to  0.000000
9/7/2010	1:04:36 PM	PHl3 MFC set to  0.000000
9/7/2010	1:04:36 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:04:36 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:04:36 PM	Tube furnace set to 0
9/7/2010	1:05:36 PM	Helium valve closed
9/7/2010	1:05:36 PM	H2 valve closed
9/7/2010	1:05:36 PM	BCl3 valve closed
9/7/2010	1:05:36 PM	PH3 valve closed
9/7/2010	1:05:36 PM	SiCl4 pre valve closed
9/7/2010	1:05:36 PM	SiCl4 post valve closed
9/7/2010	1:05:36 PM	Bubbler valve closed
9/7/2010	1:05:36 PM	Main Vac valve opened
9/7/2010	1:05:36 PM	Bypass valve opened
9/7/2010	1:05:36 PM	Helium MFC set to  0.000000
9/7/2010	1:05:36 PM	H2 MFC set to  0.000000
9/7/2010	1:05:36 PM	BCl3 MFC set to  0.000000
9/7/2010	1:05:36 PM	PHl3 MFC set to  0.000000
9/7/2010	1:05:36 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:05:36 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:05:36 PM	Tube furnace set to 0
9/7/2010	1:06:36 PM	H2 valve closed
9/7/2010	1:06:36 PM	BCl3 valve closed
9/7/2010	1:06:36 PM	PH3 valve closed
9/7/2010	1:06:36 PM	SiCl4 pre valve closed
9/7/2010	1:06:36 PM	SiCl4 post valve closed
9/7/2010	1:06:36 PM	Bubbler valve closed
9/7/2010	1:06:36 PM	Helium valve opened
9/7/2010	1:06:36 PM	Main Vac valve opened
9/7/2010	1:06:36 PM	Bypass valve opened
9/7/2010	1:06:36 PM	Helium MFC set to  100.000000
9/7/2010	1:06:36 PM	H2 MFC set to  0.000000
9/7/2010	1:06:36 PM	BCl3 MFC set to  0.000000
9/7/2010	1:06:36 PM	PHl3 MFC set to  0.000000
9/7/2010	1:06:36 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:06:36 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:06:37 PM	Tube furnace set to 0
9/7/2010	1:07:37 PM	Helium valve closed
9/7/2010	1:07:37 PM	H2 valve closed
9/7/2010	1:07:37 PM	BCl3 valve closed
9/7/2010	1:07:37 PM	PH3 valve closed
9/7/2010	1:07:37 PM	SiCl4 pre valve closed
9/7/2010	1:07:37 PM	SiCl4 post valve closed
9/7/2010	1:07:37 PM	Bubbler valve closed
9/7/2010	1:07:37 PM	Main Vac valve opened
9/7/2010	1:07:37 PM	Bypass valve opened
9/7/2010	1:07:37 PM	Helium MFC set to  0.000000
9/7/2010	1:07:37 PM	H2 MFC set to  0.000000
9/7/2010	1:07:37 PM	BCl3 MFC set to  0.000000
9/7/2010	1:07:37 PM	PHl3 MFC set to  0.000000
9/7/2010	1:07:37 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:07:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:07:37 PM	Tube furnace set to 0
9/7/2010	1:08:37 PM	H2 valve closed
9/7/2010	1:08:37 PM	BCl3 valve closed
9/7/2010	1:08:37 PM	PH3 valve closed
9/7/2010	1:08:37 PM	SiCl4 pre valve closed
9/7/2010	1:08:37 PM	SiCl4 post valve closed
9/7/2010	1:08:37 PM	Bubbler valve closed
9/7/2010	1:08:37 PM	Helium valve opened
9/7/2010	1:08:37 PM	Main Vac valve opened
9/7/2010	1:08:37 PM	Bypass valve opened
9/7/2010	1:08:37 PM	Helium MFC set to  100.000000
9/7/2010	1:08:37 PM	H2 MFC set to  0.000000
9/7/2010	1:08:37 PM	BCl3 MFC set to  0.000000
9/7/2010	1:08:37 PM	PHl3 MFC set to  0.000000
9/7/2010	1:08:37 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:08:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:08:37 PM	Tube furnace set to 0
9/7/2010	1:09:37 PM	Helium valve closed
9/7/2010	1:09:37 PM	H2 valve closed
9/7/2010	1:09:37 PM	BCl3 valve closed
9/7/2010	1:09:37 PM	PH3 valve closed
9/7/2010	1:09:37 PM	SiCl4 pre valve closed
9/7/2010	1:09:37 PM	SiCl4 post valve closed
9/7/2010	1:09:37 PM	Bubbler valve closed
9/7/2010	1:09:37 PM	Main Vac valve opened
9/7/2010	1:09:37 PM	Bypass valve opened
9/7/2010	1:09:37 PM	Helium MFC set to  0.000000
9/7/2010	1:09:37 PM	H2 MFC set to  0.000000
9/7/2010	1:09:37 PM	BCl3 MFC set to  0.000000
9/7/2010	1:09:37 PM	PHl3 MFC set to  0.000000
9/7/2010	1:09:37 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:09:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:09:37 PM	Tube furnace set to 0
9/7/2010	1:10:37 PM	H2 valve closed
9/7/2010	1:10:37 PM	BCl3 valve closed
9/7/2010	1:10:37 PM	PH3 valve closed
9/7/2010	1:10:37 PM	SiCl4 pre valve closed
9/7/2010	1:10:37 PM	SiCl4 post valve closed
9/7/2010	1:10:37 PM	Bubbler valve closed
9/7/2010	1:10:37 PM	Helium valve opened
9/7/2010	1:10:37 PM	Main Vac valve opened
9/7/2010	1:10:37 PM	Bypass valve opened
9/7/2010	1:10:37 PM	Helium MFC set to  100.000000
9/7/2010	1:10:37 PM	H2 MFC set to  0.000000
9/7/2010	1:10:37 PM	BCl3 MFC set to  0.000000
9/7/2010	1:10:37 PM	PHl3 MFC set to  0.000000
9/7/2010	1:10:37 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:10:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:10:37 PM	Tube furnace set to 0
9/7/2010	1:11:37 PM	Helium valve closed
9/7/2010	1:11:37 PM	H2 valve closed
9/7/2010	1:11:37 PM	BCl3 valve closed
9/7/2010	1:11:37 PM	PH3 valve closed
9/7/2010	1:11:37 PM	SiCl4 pre valve closed
9/7/2010	1:11:37 PM	SiCl4 post valve closed
9/7/2010	1:11:37 PM	Bubbler valve closed
9/7/2010	1:11:37 PM	Main Vac valve opened
9/7/2010	1:11:37 PM	Bypass valve opened
9/7/2010	1:11:37 PM	Helium MFC set to  0.000000
9/7/2010	1:11:37 PM	H2 MFC set to  0.000000
9/7/2010	1:11:37 PM	BCl3 MFC set to  0.000000
9/7/2010	1:11:37 PM	PHl3 MFC set to  0.000000
9/7/2010	1:11:37 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:11:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:11:38 PM	Tube furnace set to 0
9/7/2010	1:12:38 PM	H2 valve closed
9/7/2010	1:12:38 PM	BCl3 valve closed
9/7/2010	1:12:38 PM	PH3 valve closed
9/7/2010	1:12:38 PM	SiCl4 pre valve closed
9/7/2010	1:12:38 PM	SiCl4 post valve closed
9/7/2010	1:12:38 PM	Bubbler valve closed
9/7/2010	1:12:38 PM	Helium valve opened
9/7/2010	1:12:38 PM	Main Vac valve opened
9/7/2010	1:12:38 PM	Bypass valve opened
9/7/2010	1:12:38 PM	Helium MFC set to  100.000000
9/7/2010	1:12:38 PM	H2 MFC set to  0.000000
9/7/2010	1:12:38 PM	BCl3 MFC set to  0.000000
9/7/2010	1:12:38 PM	PHl3 MFC set to  0.000000
9/7/2010	1:12:38 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:12:38 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:12:38 PM	Tube furnace set to 0
9/7/2010	1:13:23 PM	Helium valve closed
9/7/2010	1:13:23 PM	H2 valve closed
9/7/2010	1:13:23 PM	BCl3 valve closed
9/7/2010	1:13:23 PM	PH3 valve closed
9/7/2010	1:13:23 PM	SiCl4 pre valve closed
9/7/2010	1:13:23 PM	SiCl4 post valve closed
9/7/2010	1:13:23 PM	Bubbler valve closed
9/7/2010	1:13:23 PM	Main Vac valve opened
9/7/2010	1:13:23 PM	Bypass valve opened
9/7/2010	1:13:23 PM	Helium MFC set to  0.000000
9/7/2010	1:13:23 PM	H2 MFC set to  0.000000
9/7/2010	1:13:23 PM	BCl3 MFC set to  0.000000
9/7/2010	1:13:23 PM	PHl3 MFC set to  0.000000
9/7/2010	1:13:23 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:13:23 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:13:24 PM	Tube furnace set to 0
9/7/2010	1:14:04 PM	Run aborted at 1:14 PM
9/7/2010	1:14:04 PM	Helium valve closed
9/7/2010	1:14:04 PM	H2 valve closed
9/7/2010	1:14:04 PM	BCl3 valve closed
9/7/2010	1:14:04 PM	PH3 valve closed
9/7/2010	1:14:04 PM	SiCl4 pre valve closed
9/7/2010	1:14:04 PM	SiCl4 post valve closed
9/7/2010	1:14:04 PM	Bypass valve closed
9/7/2010	1:14:04 PM	Main Vac valve closed
9/7/2010	1:14:04 PM	Bubbler valve closed
9/7/2010	1:14:04 PM	Helium MFC set to  0.000000
9/7/2010	1:14:04 PM	H2 MFC set to  0.000000
9/7/2010	1:14:04 PM	BCl3 MFC set to  0.000000
9/7/2010	1:14:04 PM	PHl3 MFC set to  0.000000
9/7/2010	1:14:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:14:04 PM	Tube furnace set to 0
9/7/2010	1:14:15 PM	Bypass valve opened
9/7/2010	1:14:16 PM	Main Vac valve opened
9/7/2010	1:15:14 PM	Recipe started at 1:15 PM
9/7/2010	1:15:14 PM	Helium valve closed
9/7/2010	1:15:14 PM	BCl3 valve closed
9/7/2010	1:15:14 PM	PH3 valve closed
9/7/2010	1:15:14 PM	SiCl4 pre valve closed
9/7/2010	1:15:14 PM	SiCl4 post valve closed
9/7/2010	1:15:14 PM	Main Vac valve closed
9/7/2010	1:15:14 PM	Bypass valve closed
9/7/2010	1:15:14 PM	Bubbler valve closed
9/7/2010	1:15:14 PM	H2 valve opened
9/7/2010	1:15:14 PM	Helium MFC set to  0.000000
9/7/2010	1:15:14 PM	H2 MFC set to  500.000000
9/7/2010	1:15:14 PM	BCl3 MFC set to  0.000000
9/7/2010	1:15:14 PM	PHl3 MFC set to  0.000000
9/7/2010	1:15:14 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:15:14 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:15:15 PM	Tube furnace set to 0
9/7/2010	1:16:37 PM	Helium valve closed
9/7/2010	1:16:37 PM	BCl3 valve closed
9/7/2010	1:16:37 PM	PH3 valve closed
9/7/2010	1:16:37 PM	SiCl4 pre valve closed
9/7/2010	1:16:37 PM	SiCl4 post valve closed
9/7/2010	1:16:37 PM	Main Vac valve closed
9/7/2010	1:16:37 PM	Bypass valve closed
9/7/2010	1:16:37 PM	H2 valve opened
9/7/2010	1:16:37 PM	Bubbler valve opened
9/7/2010	1:16:37 PM	Helium MFC set to  0.000000
9/7/2010	1:16:37 PM	H2 MFC set to  500.000000
9/7/2010	1:16:37 PM	BCl3 MFC set to  0.000000
9/7/2010	1:16:37 PM	PHl3 MFC set to  0.000000
9/7/2010	1:16:37 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:16:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:16:37 PM	Tube furnace set to 1000
9/7/2010	1:37:37 PM	Helium valve closed
9/7/2010	1:37:37 PM	BCl3 valve closed
9/7/2010	1:37:37 PM	PH3 valve closed
9/7/2010	1:37:37 PM	Main Vac valve closed
9/7/2010	1:37:37 PM	Bypass valve closed
9/7/2010	1:37:37 PM	H2 valve opened
9/7/2010	1:37:37 PM	SiCl4 pre valve opened
9/7/2010	1:37:37 PM	SiCl4 post valve opened
9/7/2010	1:37:37 PM	Bubbler valve opened
9/7/2010	1:37:37 PM	Helium MFC set to  0.000000
9/7/2010	1:37:37 PM	H2 MFC set to  500.000000
9/7/2010	1:37:37 PM	BCl3 MFC set to  0.000000
9/7/2010	1:37:37 PM	PHl3 MFC set to  0.000000
9/7/2010	1:37:37 PM	SiCl4 MFC set to  50.000000
9/7/2010	1:37:37 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:37:38 PM	Tube furnace set to 1000
9/7/2010	1:57:38 PM	H2 valve closed
9/7/2010	1:57:38 PM	BCl3 valve closed
9/7/2010	1:57:38 PM	PH3 valve closed
9/7/2010	1:57:38 PM	SiCl4 pre valve closed
9/7/2010	1:57:38 PM	SiCl4 post valve closed
9/7/2010	1:57:38 PM	Main Vac valve closed
9/7/2010	1:57:38 PM	Bypass valve closed
9/7/2010	1:57:38 PM	Helium valve opened
9/7/2010	1:57:38 PM	Bubbler valve opened
9/7/2010	1:57:38 PM	Helium MFC set to  500.000000
9/7/2010	1:57:38 PM	H2 MFC set to  0.000000
9/7/2010	1:57:38 PM	BCl3 MFC set to  0.000000
9/7/2010	1:57:38 PM	PHl3 MFC set to  0.000000
9/7/2010	1:57:38 PM	SiCl4 MFC set to  0.000000
9/7/2010	1:57:38 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	1:57:38 PM	Tube furnace set to 950
9/7/2010	2:02:38 PM	H2 valve closed
9/7/2010	2:02:38 PM	BCl3 valve closed
9/7/2010	2:02:38 PM	PH3 valve closed
9/7/2010	2:02:38 PM	SiCl4 pre valve closed
9/7/2010	2:02:38 PM	SiCl4 post valve closed
9/7/2010	2:02:38 PM	Main Vac valve closed
9/7/2010	2:02:38 PM	Bypass valve closed
9/7/2010	2:02:38 PM	Helium valve opened
9/7/2010	2:02:38 PM	Bubbler valve opened
9/7/2010	2:02:38 PM	Helium MFC set to  500.000000
9/7/2010	2:02:38 PM	H2 MFC set to  0.000000
9/7/2010	2:02:38 PM	BCl3 MFC set to  0.000000
9/7/2010	2:02:38 PM	PHl3 MFC set to  0.000000
9/7/2010	2:02:38 PM	SiCl4 MFC set to  0.000000
9/7/2010	2:02:38 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	2:02:38 PM	Tube furnace set to 900
9/7/2010	2:07:38 PM	H2 valve closed
9/7/2010	2:07:38 PM	BCl3 valve closed
9/7/2010	2:07:38 PM	PH3 valve closed
9/7/2010	2:07:38 PM	SiCl4 pre valve closed
9/7/2010	2:07:38 PM	SiCl4 post valve closed
9/7/2010	2:07:38 PM	Main Vac valve closed
9/7/2010	2:07:38 PM	Bypass valve closed
9/7/2010	2:07:38 PM	Helium valve opened
9/7/2010	2:07:38 PM	Bubbler valve opened
9/7/2010	2:07:38 PM	Helium MFC set to  500.000000
9/7/2010	2:07:38 PM	H2 MFC set to  0.000000
9/7/2010	2:07:38 PM	BCl3 MFC set to  0.000000
9/7/2010	2:07:38 PM	PHl3 MFC set to  0.000000
9/7/2010	2:07:38 PM	SiCl4 MFC set to  0.000000
9/7/2010	2:07:38 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	2:07:38 PM	Tube furnace set to 850
9/7/2010	2:12:38 PM	H2 valve closed
9/7/2010	2:12:38 PM	BCl3 valve closed
9/7/2010	2:12:38 PM	PH3 valve closed
9/7/2010	2:12:38 PM	SiCl4 pre valve closed
9/7/2010	2:12:38 PM	SiCl4 post valve closed
9/7/2010	2:12:38 PM	Main Vac valve closed
9/7/2010	2:12:38 PM	Bypass valve closed
9/7/2010	2:12:38 PM	Helium valve opened
9/7/2010	2:12:38 PM	Bubbler valve opened
9/7/2010	2:12:38 PM	Helium MFC set to  500.000000
9/7/2010	2:12:38 PM	H2 MFC set to  0.000000
9/7/2010	2:12:38 PM	BCl3 MFC set to  0.000000
9/7/2010	2:12:38 PM	PHl3 MFC set to  0.000000
9/7/2010	2:12:38 PM	SiCl4 MFC set to  0.000000
9/7/2010	2:12:38 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	2:12:39 PM	Tube furnace set to 800
9/7/2010	2:17:39 PM	H2 valve closed
9/7/2010	2:17:39 PM	BCl3 valve closed
9/7/2010	2:17:39 PM	PH3 valve closed
9/7/2010	2:17:39 PM	SiCl4 pre valve closed
9/7/2010	2:17:39 PM	SiCl4 post valve closed
9/7/2010	2:17:39 PM	Main Vac valve closed
9/7/2010	2:17:39 PM	Bypass valve closed
9/7/2010	2:17:39 PM	Helium valve opened
9/7/2010	2:17:39 PM	Bubbler valve opened
9/7/2010	2:17:39 PM	Helium MFC set to  500.000000
9/7/2010	2:17:39 PM	H2 MFC set to  0.000000
9/7/2010	2:17:39 PM	BCl3 MFC set to  0.000000
9/7/2010	2:17:39 PM	PHl3 MFC set to  0.000000
9/7/2010	2:17:39 PM	SiCl4 MFC set to  0.000000
9/7/2010	2:17:39 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	2:17:39 PM	Tube furnace set to 750
9/7/2010	2:22:39 PM	H2 valve closed
9/7/2010	2:22:39 PM	BCl3 valve closed
9/7/2010	2:22:39 PM	PH3 valve closed
9/7/2010	2:22:39 PM	SiCl4 pre valve closed
9/7/2010	2:22:39 PM	SiCl4 post valve closed
9/7/2010	2:22:39 PM	Main Vac valve closed
9/7/2010	2:22:39 PM	Bypass valve closed
9/7/2010	2:22:39 PM	Helium valve opened
9/7/2010	2:22:39 PM	Bubbler valve opened
9/7/2010	2:22:39 PM	Helium MFC set to  500.000000
9/7/2010	2:22:39 PM	H2 MFC set to  0.000000
9/7/2010	2:22:39 PM	BCl3 MFC set to  0.000000
9/7/2010	2:22:39 PM	PHl3 MFC set to  0.000000
9/7/2010	2:22:39 PM	SiCl4 MFC set to  0.000000
9/7/2010	2:22:39 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	2:22:39 PM	Tube furnace set to 700
9/7/2010	2:27:39 PM	H2 valve closed
9/7/2010	2:27:39 PM	BCl3 valve closed
9/7/2010	2:27:39 PM	PH3 valve closed
9/7/2010	2:27:39 PM	SiCl4 pre valve closed
9/7/2010	2:27:39 PM	SiCl4 post valve closed
9/7/2010	2:27:39 PM	Main Vac valve closed
9/7/2010	2:27:39 PM	Bypass valve closed
9/7/2010	2:27:39 PM	Helium valve opened
9/7/2010	2:27:39 PM	Bubbler valve opened
9/7/2010	2:27:39 PM	Helium MFC set to  500.000000
9/7/2010	2:27:39 PM	H2 MFC set to  0.000000
9/7/2010	2:27:39 PM	BCl3 MFC set to  0.000000
9/7/2010	2:27:39 PM	PHl3 MFC set to  0.000000
9/7/2010	2:27:39 PM	SiCl4 MFC set to  0.000000
9/7/2010	2:27:39 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	2:27:39 PM	Tube furnace set to 0
9/7/2010	2:46:39 PM	Run aborted at 2:46 PM
9/7/2010	2:46:39 PM	Helium valve closed
9/7/2010	2:46:39 PM	H2 valve closed
9/7/2010	2:46:39 PM	BCl3 valve closed
9/7/2010	2:46:39 PM	PH3 valve closed
9/7/2010	2:46:39 PM	SiCl4 pre valve closed
9/7/2010	2:46:39 PM	SiCl4 post valve closed
9/7/2010	2:46:39 PM	Bypass valve closed
9/7/2010	2:46:39 PM	Main Vac valve closed
9/7/2010	2:46:39 PM	Bubbler valve closed
9/7/2010	2:46:39 PM	Helium MFC set to  0.000000
9/7/2010	2:46:39 PM	H2 MFC set to  0.000000
9/7/2010	2:46:39 PM	BCl3 MFC set to  0.000000
9/7/2010	2:46:39 PM	PHl3 MFC set to  0.000000
9/7/2010	2:46:40 PM	SiCl4 MFC set to  0.000000
9/7/2010	2:46:40 PM	Tube furnace set to 0
9/7/2010	3:02:23 PM	Recipe started at 3:02 PM
9/7/2010	3:02:23 PM	Helium valve closed
9/7/2010	3:02:23 PM	H2 valve closed
9/7/2010	3:02:23 PM	BCl3 valve closed
9/7/2010	3:02:23 PM	PH3 valve closed
9/7/2010	3:02:23 PM	SiCl4 pre valve closed
9/7/2010	3:02:23 PM	SiCl4 post valve closed
9/7/2010	3:02:23 PM	Main Vac valve closed
9/7/2010	3:02:23 PM	Bubbler valve closed
9/7/2010	3:02:23 PM	Bypass valve opened
9/7/2010	3:02:23 PM	Helium MFC set to  0.000000
9/7/2010	3:02:23 PM	H2 MFC set to  0.000000
9/7/2010	3:02:23 PM	BCl3 MFC set to  0.000000
9/7/2010	3:02:23 PM	PHl3 MFC set to  0.000000
9/7/2010	3:02:23 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:02:23 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:02:23 PM	Tube furnace set to 0
9/7/2010	3:03:04 PM	Helium valve closed
9/7/2010	3:03:04 PM	H2 valve closed
9/7/2010	3:03:04 PM	BCl3 valve closed
9/7/2010	3:03:04 PM	PH3 valve closed
9/7/2010	3:03:04 PM	SiCl4 pre valve closed
9/7/2010	3:03:04 PM	SiCl4 post valve closed
9/7/2010	3:03:04 PM	Bubbler valve closed
9/7/2010	3:03:04 PM	Main Vac valve opened
9/7/2010	3:03:04 PM	Bypass valve opened
9/7/2010	3:03:04 PM	Helium MFC set to  0.000000
9/7/2010	3:03:04 PM	H2 MFC set to  0.000000
9/7/2010	3:03:04 PM	BCl3 MFC set to  0.000000
9/7/2010	3:03:04 PM	PHl3 MFC set to  0.000000
9/7/2010	3:03:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:03:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:03:04 PM	Tube furnace set to 0
9/7/2010	3:04:05 PM	H2 valve closed
9/7/2010	3:04:05 PM	BCl3 valve closed
9/7/2010	3:04:05 PM	PH3 valve closed
9/7/2010	3:04:05 PM	SiCl4 pre valve closed
9/7/2010	3:04:05 PM	SiCl4 post valve closed
9/7/2010	3:04:05 PM	Bubbler valve closed
9/7/2010	3:04:05 PM	Helium valve opened
9/7/2010	3:04:05 PM	Main Vac valve opened
9/7/2010	3:04:05 PM	Bypass valve opened
9/7/2010	3:04:05 PM	Helium MFC set to  100.000000
9/7/2010	3:04:05 PM	H2 MFC set to  0.000000
9/7/2010	3:04:05 PM	BCl3 MFC set to  0.000000
9/7/2010	3:04:05 PM	PHl3 MFC set to  0.000000
9/7/2010	3:04:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:04:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:04:05 PM	Tube furnace set to 0
9/7/2010	3:05:05 PM	Helium valve closed
9/7/2010	3:05:05 PM	H2 valve closed
9/7/2010	3:05:05 PM	BCl3 valve closed
9/7/2010	3:05:05 PM	PH3 valve closed
9/7/2010	3:05:05 PM	SiCl4 pre valve closed
9/7/2010	3:05:05 PM	SiCl4 post valve closed
9/7/2010	3:05:05 PM	Bubbler valve closed
9/7/2010	3:05:05 PM	Main Vac valve opened
9/7/2010	3:05:05 PM	Bypass valve opened
9/7/2010	3:05:05 PM	Helium MFC set to  0.000000
9/7/2010	3:05:05 PM	H2 MFC set to  0.000000
9/7/2010	3:05:05 PM	BCl3 MFC set to  0.000000
9/7/2010	3:05:05 PM	PHl3 MFC set to  0.000000
9/7/2010	3:05:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:05:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:05:05 PM	Tube furnace set to 0
9/7/2010	3:06:05 PM	H2 valve closed
9/7/2010	3:06:05 PM	BCl3 valve closed
9/7/2010	3:06:05 PM	PH3 valve closed
9/7/2010	3:06:05 PM	SiCl4 pre valve closed
9/7/2010	3:06:05 PM	SiCl4 post valve closed
9/7/2010	3:06:05 PM	Bubbler valve closed
9/7/2010	3:06:05 PM	Helium valve opened
9/7/2010	3:06:05 PM	Main Vac valve opened
9/7/2010	3:06:05 PM	Bypass valve opened
9/7/2010	3:06:05 PM	Helium MFC set to  100.000000
9/7/2010	3:06:05 PM	H2 MFC set to  0.000000
9/7/2010	3:06:05 PM	BCl3 MFC set to  0.000000
9/7/2010	3:06:05 PM	PHl3 MFC set to  0.000000
9/7/2010	3:06:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:06:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:06:05 PM	Tube furnace set to 0
9/7/2010	3:07:05 PM	Helium valve closed
9/7/2010	3:07:05 PM	H2 valve closed
9/7/2010	3:07:05 PM	BCl3 valve closed
9/7/2010	3:07:05 PM	PH3 valve closed
9/7/2010	3:07:05 PM	SiCl4 pre valve closed
9/7/2010	3:07:05 PM	SiCl4 post valve closed
9/7/2010	3:07:05 PM	Bubbler valve closed
9/7/2010	3:07:05 PM	Main Vac valve opened
9/7/2010	3:07:05 PM	Bypass valve opened
9/7/2010	3:07:05 PM	Helium MFC set to  0.000000
9/7/2010	3:07:05 PM	H2 MFC set to  0.000000
9/7/2010	3:07:05 PM	BCl3 MFC set to  0.000000
9/7/2010	3:07:05 PM	PHl3 MFC set to  0.000000
9/7/2010	3:07:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:07:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:07:05 PM	Tube furnace set to 0
9/7/2010	3:08:05 PM	H2 valve closed
9/7/2010	3:08:05 PM	BCl3 valve closed
9/7/2010	3:08:05 PM	PH3 valve closed
9/7/2010	3:08:05 PM	SiCl4 pre valve closed
9/7/2010	3:08:05 PM	SiCl4 post valve closed
9/7/2010	3:08:05 PM	Bubbler valve closed
9/7/2010	3:08:05 PM	Helium valve opened
9/7/2010	3:08:05 PM	Main Vac valve opened
9/7/2010	3:08:05 PM	Bypass valve opened
9/7/2010	3:08:05 PM	Helium MFC set to  100.000000
9/7/2010	3:08:05 PM	H2 MFC set to  0.000000
9/7/2010	3:08:05 PM	BCl3 MFC set to  0.000000
9/7/2010	3:08:05 PM	PHl3 MFC set to  0.000000
9/7/2010	3:08:05 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:08:05 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:08:06 PM	Tube furnace set to 0
9/7/2010	3:09:06 PM	Helium valve closed
9/7/2010	3:09:06 PM	H2 valve closed
9/7/2010	3:09:06 PM	BCl3 valve closed
9/7/2010	3:09:06 PM	PH3 valve closed
9/7/2010	3:09:06 PM	SiCl4 pre valve closed
9/7/2010	3:09:06 PM	SiCl4 post valve closed
9/7/2010	3:09:06 PM	Bubbler valve closed
9/7/2010	3:09:06 PM	Main Vac valve opened
9/7/2010	3:09:06 PM	Bypass valve opened
9/7/2010	3:09:06 PM	Helium MFC set to  0.000000
9/7/2010	3:09:06 PM	H2 MFC set to  0.000000
9/7/2010	3:09:06 PM	BCl3 MFC set to  0.000000
9/7/2010	3:09:06 PM	PHl3 MFC set to  0.000000
9/7/2010	3:09:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:09:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:09:06 PM	Tube furnace set to 0
9/7/2010	3:10:06 PM	H2 valve closed
9/7/2010	3:10:06 PM	BCl3 valve closed
9/7/2010	3:10:06 PM	PH3 valve closed
9/7/2010	3:10:06 PM	SiCl4 pre valve closed
9/7/2010	3:10:06 PM	SiCl4 post valve closed
9/7/2010	3:10:06 PM	Bubbler valve closed
9/7/2010	3:10:06 PM	Helium valve opened
9/7/2010	3:10:06 PM	Main Vac valve opened
9/7/2010	3:10:06 PM	Bypass valve opened
9/7/2010	3:10:06 PM	Helium MFC set to  100.000000
9/7/2010	3:10:06 PM	H2 MFC set to  0.000000
9/7/2010	3:10:06 PM	BCl3 MFC set to  0.000000
9/7/2010	3:10:06 PM	PHl3 MFC set to  0.000000
9/7/2010	3:10:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:10:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:10:06 PM	Tube furnace set to 0
9/7/2010	3:11:06 PM	Helium valve closed
9/7/2010	3:11:06 PM	H2 valve closed
9/7/2010	3:11:06 PM	BCl3 valve closed
9/7/2010	3:11:06 PM	PH3 valve closed
9/7/2010	3:11:06 PM	SiCl4 pre valve closed
9/7/2010	3:11:06 PM	SiCl4 post valve closed
9/7/2010	3:11:06 PM	Bubbler valve closed
9/7/2010	3:11:06 PM	Main Vac valve opened
9/7/2010	3:11:06 PM	Bypass valve opened
9/7/2010	3:11:06 PM	Helium MFC set to  0.000000
9/7/2010	3:11:06 PM	H2 MFC set to  0.000000
9/7/2010	3:11:06 PM	BCl3 MFC set to  0.000000
9/7/2010	3:11:06 PM	PHl3 MFC set to  0.000000
9/7/2010	3:11:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:11:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:11:06 PM	Tube furnace set to 0
9/7/2010	3:12:06 PM	H2 valve closed
9/7/2010	3:12:06 PM	BCl3 valve closed
9/7/2010	3:12:06 PM	PH3 valve closed
9/7/2010	3:12:06 PM	SiCl4 pre valve closed
9/7/2010	3:12:06 PM	SiCl4 post valve closed
9/7/2010	3:12:06 PM	Bubbler valve closed
9/7/2010	3:12:06 PM	Helium valve opened
9/7/2010	3:12:06 PM	Main Vac valve opened
9/7/2010	3:12:06 PM	Bypass valve opened
9/7/2010	3:12:06 PM	Helium MFC set to  100.000000
9/7/2010	3:12:06 PM	H2 MFC set to  0.000000
9/7/2010	3:12:06 PM	BCl3 MFC set to  0.000000
9/7/2010	3:12:06 PM	PHl3 MFC set to  0.000000
9/7/2010	3:12:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:12:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:12:06 PM	Tube furnace set to 0
9/7/2010	3:13:06 PM	Helium valve closed
9/7/2010	3:13:06 PM	H2 valve closed
9/7/2010	3:13:06 PM	BCl3 valve closed
9/7/2010	3:13:06 PM	PH3 valve closed
9/7/2010	3:13:06 PM	SiCl4 pre valve closed
9/7/2010	3:13:06 PM	SiCl4 post valve closed
9/7/2010	3:13:06 PM	Bubbler valve closed
9/7/2010	3:13:06 PM	Main Vac valve opened
9/7/2010	3:13:06 PM	Bypass valve opened
9/7/2010	3:13:06 PM	Helium MFC set to  0.000000
9/7/2010	3:13:06 PM	H2 MFC set to  0.000000
9/7/2010	3:13:06 PM	BCl3 MFC set to  0.000000
9/7/2010	3:13:06 PM	PHl3 MFC set to  0.000000
9/7/2010	3:13:06 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:13:06 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:13:07 PM	Tube furnace set to 0
9/7/2010	3:14:07 PM	H2 valve closed
9/7/2010	3:14:07 PM	BCl3 valve closed
9/7/2010	3:14:07 PM	PH3 valve closed
9/7/2010	3:14:07 PM	SiCl4 pre valve closed
9/7/2010	3:14:07 PM	SiCl4 post valve closed
9/7/2010	3:14:07 PM	Bubbler valve closed
9/7/2010	3:14:07 PM	Helium valve opened
9/7/2010	3:14:07 PM	Main Vac valve opened
9/7/2010	3:14:07 PM	Bypass valve opened
9/7/2010	3:14:07 PM	Helium MFC set to  100.000000
9/7/2010	3:14:07 PM	H2 MFC set to  0.000000
9/7/2010	3:14:07 PM	BCl3 MFC set to  0.000000
9/7/2010	3:14:07 PM	PHl3 MFC set to  0.000000
9/7/2010	3:14:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:14:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:14:07 PM	Tube furnace set to 0
9/7/2010	3:15:07 PM	Helium valve closed
9/7/2010	3:15:07 PM	H2 valve closed
9/7/2010	3:15:07 PM	BCl3 valve closed
9/7/2010	3:15:07 PM	PH3 valve closed
9/7/2010	3:15:07 PM	SiCl4 pre valve closed
9/7/2010	3:15:07 PM	SiCl4 post valve closed
9/7/2010	3:15:07 PM	Bubbler valve closed
9/7/2010	3:15:07 PM	Main Vac valve opened
9/7/2010	3:15:07 PM	Bypass valve opened
9/7/2010	3:15:07 PM	Helium MFC set to  0.000000
9/7/2010	3:15:07 PM	H2 MFC set to  0.000000
9/7/2010	3:15:07 PM	BCl3 MFC set to  0.000000
9/7/2010	3:15:07 PM	PHl3 MFC set to  0.000000
9/7/2010	3:15:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:15:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:15:07 PM	Tube furnace set to 0
9/7/2010	3:16:07 PM	H2 valve closed
9/7/2010	3:16:07 PM	BCl3 valve closed
9/7/2010	3:16:07 PM	PH3 valve closed
9/7/2010	3:16:07 PM	SiCl4 pre valve closed
9/7/2010	3:16:07 PM	SiCl4 post valve closed
9/7/2010	3:16:07 PM	Bubbler valve closed
9/7/2010	3:16:07 PM	Helium valve opened
9/7/2010	3:16:07 PM	Main Vac valve opened
9/7/2010	3:16:07 PM	Bypass valve opened
9/7/2010	3:16:07 PM	Helium MFC set to  100.000000
9/7/2010	3:16:07 PM	H2 MFC set to  0.000000
9/7/2010	3:16:07 PM	BCl3 MFC set to  0.000000
9/7/2010	3:16:07 PM	PHl3 MFC set to  0.000000
9/7/2010	3:16:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:16:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:16:07 PM	Tube furnace set to 0
9/7/2010	3:17:07 PM	Helium valve closed
9/7/2010	3:17:07 PM	H2 valve closed
9/7/2010	3:17:07 PM	BCl3 valve closed
9/7/2010	3:17:07 PM	PH3 valve closed
9/7/2010	3:17:07 PM	SiCl4 pre valve closed
9/7/2010	3:17:07 PM	SiCl4 post valve closed
9/7/2010	3:17:07 PM	Bubbler valve closed
9/7/2010	3:17:07 PM	Main Vac valve opened
9/7/2010	3:17:07 PM	Bypass valve opened
9/7/2010	3:17:07 PM	Helium MFC set to  0.000000
9/7/2010	3:17:07 PM	H2 MFC set to  0.000000
9/7/2010	3:17:07 PM	BCl3 MFC set to  0.000000
9/7/2010	3:17:07 PM	PHl3 MFC set to  0.000000
9/7/2010	3:17:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:17:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:17:07 PM	Tube furnace set to 0
9/7/2010	3:18:07 PM	H2 valve closed
9/7/2010	3:18:07 PM	BCl3 valve closed
9/7/2010	3:18:07 PM	PH3 valve closed
9/7/2010	3:18:07 PM	SiCl4 pre valve closed
9/7/2010	3:18:07 PM	SiCl4 post valve closed
9/7/2010	3:18:07 PM	Bubbler valve closed
9/7/2010	3:18:07 PM	Helium valve opened
9/7/2010	3:18:07 PM	Main Vac valve opened
9/7/2010	3:18:07 PM	Bypass valve opened
9/7/2010	3:18:07 PM	Helium MFC set to  100.000000
9/7/2010	3:18:07 PM	H2 MFC set to  0.000000
9/7/2010	3:18:07 PM	BCl3 MFC set to  0.000000
9/7/2010	3:18:07 PM	PHl3 MFC set to  0.000000
9/7/2010	3:18:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:18:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:18:08 PM	Tube furnace set to 0
9/7/2010	3:19:08 PM	Helium valve closed
9/7/2010	3:19:08 PM	H2 valve closed
9/7/2010	3:19:08 PM	BCl3 valve closed
9/7/2010	3:19:08 PM	PH3 valve closed
9/7/2010	3:19:08 PM	SiCl4 pre valve closed
9/7/2010	3:19:08 PM	SiCl4 post valve closed
9/7/2010	3:19:08 PM	Bubbler valve closed
9/7/2010	3:19:08 PM	Main Vac valve opened
9/7/2010	3:19:08 PM	Bypass valve opened
9/7/2010	3:19:08 PM	Helium MFC set to  0.000000
9/7/2010	3:19:08 PM	H2 MFC set to  0.000000
9/7/2010	3:19:08 PM	BCl3 MFC set to  0.000000
9/7/2010	3:19:08 PM	PHl3 MFC set to  0.000000
9/7/2010	3:19:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:19:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:19:08 PM	Tube furnace set to 0
9/7/2010	3:20:08 PM	H2 valve closed
9/7/2010	3:20:08 PM	BCl3 valve closed
9/7/2010	3:20:08 PM	PH3 valve closed
9/7/2010	3:20:08 PM	SiCl4 pre valve closed
9/7/2010	3:20:08 PM	SiCl4 post valve closed
9/7/2010	3:20:08 PM	Bubbler valve closed
9/7/2010	3:20:08 PM	Helium valve opened
9/7/2010	3:20:08 PM	Main Vac valve opened
9/7/2010	3:20:08 PM	Bypass valve opened
9/7/2010	3:20:08 PM	Helium MFC set to  100.000000
9/7/2010	3:20:08 PM	H2 MFC set to  0.000000
9/7/2010	3:20:08 PM	BCl3 MFC set to  0.000000
9/7/2010	3:20:08 PM	PHl3 MFC set to  0.000000
9/7/2010	3:20:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:20:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:20:08 PM	Tube furnace set to 0
9/7/2010	3:21:08 PM	Helium valve closed
9/7/2010	3:21:08 PM	H2 valve closed
9/7/2010	3:21:08 PM	BCl3 valve closed
9/7/2010	3:21:08 PM	PH3 valve closed
9/7/2010	3:21:08 PM	SiCl4 pre valve closed
9/7/2010	3:21:08 PM	SiCl4 post valve closed
9/7/2010	3:21:08 PM	Bubbler valve closed
9/7/2010	3:21:08 PM	Main Vac valve opened
9/7/2010	3:21:08 PM	Bypass valve opened
9/7/2010	3:21:08 PM	Helium MFC set to  0.000000
9/7/2010	3:21:08 PM	H2 MFC set to  0.000000
9/7/2010	3:21:08 PM	BCl3 MFC set to  0.000000
9/7/2010	3:21:08 PM	PHl3 MFC set to  0.000000
9/7/2010	3:21:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:21:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:21:08 PM	Tube furnace set to 0
9/7/2010	3:22:08 PM	H2 valve closed
9/7/2010	3:22:08 PM	BCl3 valve closed
9/7/2010	3:22:08 PM	PH3 valve closed
9/7/2010	3:22:08 PM	SiCl4 pre valve closed
9/7/2010	3:22:08 PM	SiCl4 post valve closed
9/7/2010	3:22:08 PM	Bubbler valve closed
9/7/2010	3:22:08 PM	Helium valve opened
9/7/2010	3:22:08 PM	Main Vac valve opened
9/7/2010	3:22:08 PM	Bypass valve opened
9/7/2010	3:22:08 PM	Helium MFC set to  100.000000
9/7/2010	3:22:08 PM	H2 MFC set to  0.000000
9/7/2010	3:22:08 PM	BCl3 MFC set to  0.000000
9/7/2010	3:22:08 PM	PHl3 MFC set to  0.000000
9/7/2010	3:22:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:22:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:22:08 PM	Tube furnace set to 0
9/7/2010	3:23:08 PM	Helium valve closed
9/7/2010	3:23:08 PM	H2 valve closed
9/7/2010	3:23:08 PM	BCl3 valve closed
9/7/2010	3:23:08 PM	PH3 valve closed
9/7/2010	3:23:08 PM	SiCl4 pre valve closed
9/7/2010	3:23:08 PM	SiCl4 post valve closed
9/7/2010	3:23:08 PM	Bubbler valve closed
9/7/2010	3:23:08 PM	Main Vac valve opened
9/7/2010	3:23:08 PM	Bypass valve opened
9/7/2010	3:23:08 PM	Helium MFC set to  0.000000
9/7/2010	3:23:08 PM	H2 MFC set to  0.000000
9/7/2010	3:23:08 PM	BCl3 MFC set to  0.000000
9/7/2010	3:23:08 PM	PHl3 MFC set to  0.000000
9/7/2010	3:23:08 PM	SiCl4 MFC set to  0.000000
9/7/2010	3:23:08 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	3:23:08 PM	Tube furnace set to 100
9/7/2010	3:23:09 PM	Run finished at 3:23 PM
9/7/2010	3:24:39 PM	Bypass valve closed
9/7/2010	3:24:39 PM	Main Vac valve closed
9/7/2010	3:24:47 PM	Bypass valve opened
9/7/2010	3:24:48 PM	Main Vac valve opened
9/7/2010	4:05:48 PM	Helium MFC set to  100.000000
9/7/2010	4:05:49 PM	Helium valve opened
9/7/2010	4:05:53 PM	Helium valve closed
9/7/2010	4:06:51 PM	Recipe started at 4:06 PM
9/7/2010	4:06:51 PM	Helium valve closed
9/7/2010	4:06:51 PM	BCl3 valve closed
9/7/2010	4:06:51 PM	PH3 valve closed
9/7/2010	4:06:51 PM	SiCl4 pre valve closed
9/7/2010	4:06:51 PM	SiCl4 post valve closed
9/7/2010	4:06:51 PM	Main Vac valve closed
9/7/2010	4:06:51 PM	Bypass valve closed
9/7/2010	4:06:51 PM	Bubbler valve closed
9/7/2010	4:06:51 PM	H2 valve opened
9/7/2010	4:06:51 PM	Helium MFC set to  0.000000
9/7/2010	4:06:51 PM	H2 MFC set to  500.000000
9/7/2010	4:06:51 PM	BCl3 MFC set to  0.000000
9/7/2010	4:06:51 PM	PHl3 MFC set to  0.000000
9/7/2010	4:06:51 PM	SiCl4 MFC set to  0.000000
9/7/2010	4:06:51 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	4:06:51 PM	Tube furnace set to 0
9/7/2010	4:08:11 PM	Helium valve closed
9/7/2010	4:08:11 PM	BCl3 valve closed
9/7/2010	4:08:11 PM	PH3 valve closed
9/7/2010	4:08:11 PM	SiCl4 pre valve closed
9/7/2010	4:08:11 PM	SiCl4 post valve closed
9/7/2010	4:08:11 PM	Main Vac valve closed
9/7/2010	4:08:11 PM	Bypass valve closed
9/7/2010	4:08:11 PM	H2 valve opened
9/7/2010	4:08:11 PM	Bubbler valve opened
9/7/2010	4:08:11 PM	Helium MFC set to  0.000000
9/7/2010	4:08:11 PM	H2 MFC set to  500.000000
9/7/2010	4:08:11 PM	BCl3 MFC set to  0.000000
9/7/2010	4:08:11 PM	PHl3 MFC set to  0.000000
9/7/2010	4:08:11 PM	SiCl4 MFC set to  0.000000
9/7/2010	4:08:11 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	4:08:11 PM	Tube furnace set to 1000
9/7/2010	4:28:11 PM	Helium valve closed
9/7/2010	4:28:11 PM	BCl3 valve closed
9/7/2010	4:28:11 PM	PH3 valve closed
9/7/2010	4:28:11 PM	Main Vac valve closed
9/7/2010	4:28:11 PM	Bypass valve closed
9/7/2010	4:28:11 PM	H2 valve opened
9/7/2010	4:28:11 PM	SiCl4 pre valve opened
9/7/2010	4:28:11 PM	SiCl4 post valve opened
9/7/2010	4:28:11 PM	Bubbler valve opened
9/7/2010	4:28:11 PM	Helium MFC set to  0.000000
9/7/2010	4:28:11 PM	H2 MFC set to  500.000000
9/7/2010	4:28:11 PM	BCl3 MFC set to  0.000000
9/7/2010	4:28:11 PM	PHl3 MFC set to  0.000000
9/7/2010	4:28:11 PM	SiCl4 MFC set to  50.000000
9/7/2010	4:28:11 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	4:28:11 PM	Tube furnace set to 1000
9/7/2010	4:48:12 PM	H2 valve closed
9/7/2010	4:48:12 PM	BCl3 valve closed
9/7/2010	4:48:12 PM	PH3 valve closed
9/7/2010	4:48:12 PM	SiCl4 pre valve closed
9/7/2010	4:48:12 PM	SiCl4 post valve closed
9/7/2010	4:48:12 PM	Main Vac valve closed
9/7/2010	4:48:12 PM	Bypass valve closed
9/7/2010	4:48:12 PM	Helium valve opened
9/7/2010	4:48:12 PM	Bubbler valve opened
9/7/2010	4:48:12 PM	Helium MFC set to  500.000000
9/7/2010	4:48:12 PM	H2 MFC set to  0.000000
9/7/2010	4:48:12 PM	BCl3 MFC set to  0.000000
9/7/2010	4:48:12 PM	PHl3 MFC set to  0.000000
9/7/2010	4:48:12 PM	SiCl4 MFC set to  0.000000
9/7/2010	4:48:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	4:48:12 PM	Tube furnace set to 950
9/7/2010	4:53:12 PM	H2 valve closed
9/7/2010	4:53:12 PM	BCl3 valve closed
9/7/2010	4:53:12 PM	PH3 valve closed
9/7/2010	4:53:12 PM	SiCl4 pre valve closed
9/7/2010	4:53:12 PM	SiCl4 post valve closed
9/7/2010	4:53:12 PM	Main Vac valve closed
9/7/2010	4:53:12 PM	Bypass valve closed
9/7/2010	4:53:12 PM	Helium valve opened
9/7/2010	4:53:12 PM	Bubbler valve opened
9/7/2010	4:53:12 PM	Helium MFC set to  500.000000
9/7/2010	4:53:12 PM	H2 MFC set to  0.000000
9/7/2010	4:53:12 PM	BCl3 MFC set to  0.000000
9/7/2010	4:53:12 PM	PHl3 MFC set to  0.000000
9/7/2010	4:53:12 PM	SiCl4 MFC set to  0.000000
9/7/2010	4:53:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	4:53:12 PM	Tube furnace set to 900
9/7/2010	4:58:12 PM	H2 valve closed
9/7/2010	4:58:12 PM	BCl3 valve closed
9/7/2010	4:58:12 PM	PH3 valve closed
9/7/2010	4:58:12 PM	SiCl4 pre valve closed
9/7/2010	4:58:12 PM	SiCl4 post valve closed
9/7/2010	4:58:12 PM	Main Vac valve closed
9/7/2010	4:58:12 PM	Bypass valve closed
9/7/2010	4:58:12 PM	Helium valve opened
9/7/2010	4:58:12 PM	Bubbler valve opened
9/7/2010	4:58:12 PM	Helium MFC set to  500.000000
9/7/2010	4:58:12 PM	H2 MFC set to  0.000000
9/7/2010	4:58:12 PM	BCl3 MFC set to  0.000000
9/7/2010	4:58:12 PM	PHl3 MFC set to  0.000000
9/7/2010	4:58:12 PM	SiCl4 MFC set to  0.000000
9/7/2010	4:58:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	4:58:12 PM	Tube furnace set to 850
9/7/2010	5:03:12 PM	H2 valve closed
9/7/2010	5:03:12 PM	BCl3 valve closed
9/7/2010	5:03:12 PM	PH3 valve closed
9/7/2010	5:03:12 PM	SiCl4 pre valve closed
9/7/2010	5:03:12 PM	SiCl4 post valve closed
9/7/2010	5:03:12 PM	Main Vac valve closed
9/7/2010	5:03:12 PM	Bypass valve closed
9/7/2010	5:03:12 PM	Helium valve opened
9/7/2010	5:03:12 PM	Bubbler valve opened
9/7/2010	5:03:12 PM	Helium MFC set to  500.000000
9/7/2010	5:03:12 PM	H2 MFC set to  0.000000
9/7/2010	5:03:12 PM	BCl3 MFC set to  0.000000
9/7/2010	5:03:12 PM	PHl3 MFC set to  0.000000
9/7/2010	5:03:12 PM	SiCl4 MFC set to  0.000000
9/7/2010	5:03:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	5:03:12 PM	Tube furnace set to 800
9/7/2010	5:08:12 PM	H2 valve closed
9/7/2010	5:08:12 PM	BCl3 valve closed
9/7/2010	5:08:12 PM	PH3 valve closed
9/7/2010	5:08:12 PM	SiCl4 pre valve closed
9/7/2010	5:08:12 PM	SiCl4 post valve closed
9/7/2010	5:08:12 PM	Main Vac valve closed
9/7/2010	5:08:12 PM	Bypass valve closed
9/7/2010	5:08:12 PM	Helium valve opened
9/7/2010	5:08:12 PM	Bubbler valve opened
9/7/2010	5:08:12 PM	Helium MFC set to  500.000000
9/7/2010	5:08:12 PM	H2 MFC set to  0.000000
9/7/2010	5:08:12 PM	BCl3 MFC set to  0.000000
9/7/2010	5:08:12 PM	PHl3 MFC set to  0.000000
9/7/2010	5:08:12 PM	SiCl4 MFC set to  0.000000
9/7/2010	5:08:12 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	5:08:13 PM	Tube furnace set to 750
9/7/2010	5:13:13 PM	H2 valve closed
9/7/2010	5:13:13 PM	BCl3 valve closed
9/7/2010	5:13:13 PM	PH3 valve closed
9/7/2010	5:13:13 PM	SiCl4 pre valve closed
9/7/2010	5:13:13 PM	SiCl4 post valve closed
9/7/2010	5:13:13 PM	Main Vac valve closed
9/7/2010	5:13:13 PM	Bypass valve closed
9/7/2010	5:13:13 PM	Helium valve opened
9/7/2010	5:13:13 PM	Bubbler valve opened
9/7/2010	5:13:13 PM	Helium MFC set to  500.000000
9/7/2010	5:13:13 PM	H2 MFC set to  0.000000
9/7/2010	5:13:13 PM	BCl3 MFC set to  0.000000
9/7/2010	5:13:13 PM	PHl3 MFC set to  0.000000
9/7/2010	5:13:13 PM	SiCl4 MFC set to  0.000000
9/7/2010	5:13:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	5:13:13 PM	Tube furnace set to 700
9/7/2010	5:18:13 PM	H2 valve closed
9/7/2010	5:18:13 PM	BCl3 valve closed
9/7/2010	5:18:13 PM	PH3 valve closed
9/7/2010	5:18:13 PM	SiCl4 pre valve closed
9/7/2010	5:18:13 PM	SiCl4 post valve closed
9/7/2010	5:18:13 PM	Main Vac valve closed
9/7/2010	5:18:13 PM	Bypass valve closed
9/7/2010	5:18:13 PM	Helium valve opened
9/7/2010	5:18:13 PM	Bubbler valve opened
9/7/2010	5:18:13 PM	Helium MFC set to  500.000000
9/7/2010	5:18:13 PM	H2 MFC set to  0.000000
9/7/2010	5:18:13 PM	BCl3 MFC set to  0.000000
9/7/2010	5:18:13 PM	PHl3 MFC set to  0.000000
9/7/2010	5:18:13 PM	SiCl4 MFC set to  0.000000
9/7/2010	5:18:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	5:18:13 PM	Tube furnace set to 0
9/7/2010	5:38:13 PM	Helium valve closed
9/7/2010	5:38:13 PM	H2 valve closed
9/7/2010	5:38:13 PM	BCl3 valve closed
9/7/2010	5:38:13 PM	PH3 valve closed
9/7/2010	5:38:13 PM	SiCl4 pre valve closed
9/7/2010	5:38:13 PM	SiCl4 post valve closed
9/7/2010	5:38:13 PM	Main Vac valve closed
9/7/2010	5:38:13 PM	Bypass valve closed
9/7/2010	5:38:13 PM	Bubbler valve closed
9/7/2010	5:38:13 PM	Helium MFC set to  0.000000
9/7/2010	5:38:13 PM	H2 MFC set to  0.000000
9/7/2010	5:38:13 PM	BCl3 MFC set to  0.000000
9/7/2010	5:38:13 PM	PHl3 MFC set to  0.000000
9/7/2010	5:38:13 PM	SiCl4 MFC set to  0.000000
9/7/2010	5:38:13 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	5:38:13 PM	Tube furnace set to 0
9/7/2010	5:38:14 PM	Run finished at 5:38 PM
9/7/2010	9:40:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2010	9:40:07 PM	Recipe started at 9:40 PM
9/7/2010	9:40:07 PM	H2 valve closed
9/7/2010	9:40:07 PM	BCl3 valve closed
9/7/2010	9:40:07 PM	PH3 valve closed
9/7/2010	9:40:07 PM	SiCl4 pre valve closed
9/7/2010	9:40:07 PM	SiCl4 post valve closed
9/7/2010	9:40:07 PM	Main Vac valve closed
9/7/2010	9:40:07 PM	Bypass valve closed
9/7/2010	9:40:07 PM	Bubbler valve closed
9/7/2010	9:40:07 PM	Helium valve opened
9/7/2010	9:40:07 PM	Helium MFC set to  500.000000
9/7/2010	9:40:07 PM	H2 MFC set to  0.000000
9/7/2010	9:40:07 PM	BCl3 MFC set to  0.000000
9/7/2010	9:40:07 PM	PHl3 MFC set to  0.000000
9/7/2010	9:40:07 PM	SiCl4 MFC set to  0.000000
9/7/2010	9:40:07 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	9:40:07 PM	Tube furnace set to 0
9/7/2010	9:40:25 PM	Run aborted at 9:40 PM
9/7/2010	9:40:25 PM	Helium valve closed
9/7/2010	9:40:25 PM	H2 valve closed
9/7/2010	9:40:25 PM	BCl3 valve closed
9/7/2010	9:40:25 PM	PH3 valve closed
9/7/2010	9:40:25 PM	SiCl4 pre valve closed
9/7/2010	9:40:25 PM	SiCl4 post valve closed
9/7/2010	9:40:25 PM	Bypass valve closed
9/7/2010	9:40:25 PM	Main Vac valve closed
9/7/2010	9:40:25 PM	Bubbler valve closed
9/7/2010	9:40:25 PM	Helium MFC set to  0.000000
9/7/2010	9:40:25 PM	H2 MFC set to  0.000000
9/7/2010	9:40:25 PM	BCl3 MFC set to  0.000000
9/7/2010	9:40:25 PM	PHl3 MFC set to  0.000000
9/7/2010	9:40:25 PM	SiCl4 MFC set to  0.000000
9/7/2010	9:40:25 PM	Tube furnace set to 0
9/7/2010	9:40:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/7/2010	9:55:42 PM	Recipe started at 9:55 PM
9/7/2010	9:55:42 PM	Helium valve closed
9/7/2010	9:55:42 PM	H2 valve closed
9/7/2010	9:55:42 PM	BCl3 valve closed
9/7/2010	9:55:42 PM	PH3 valve closed
9/7/2010	9:55:42 PM	SiCl4 pre valve closed
9/7/2010	9:55:42 PM	SiCl4 post valve closed
9/7/2010	9:55:42 PM	Main Vac valve closed
9/7/2010	9:55:42 PM	Bubbler valve closed
9/7/2010	9:55:42 PM	Bypass valve opened
9/7/2010	9:55:42 PM	Helium MFC set to  0.000000
9/7/2010	9:55:42 PM	H2 MFC set to  0.000000
9/7/2010	9:55:42 PM	BCl3 MFC set to  0.000000
9/7/2010	9:55:42 PM	PHl3 MFC set to  0.000000
9/7/2010	9:55:42 PM	SiCl4 MFC set to  0.000000
9/7/2010	9:55:42 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	9:55:42 PM	Tube furnace set to 0
9/7/2010	9:56:24 PM	Helium valve closed
9/7/2010	9:56:24 PM	H2 valve closed
9/7/2010	9:56:24 PM	BCl3 valve closed
9/7/2010	9:56:24 PM	PH3 valve closed
9/7/2010	9:56:24 PM	SiCl4 pre valve closed
9/7/2010	9:56:24 PM	SiCl4 post valve closed
9/7/2010	9:56:24 PM	Bubbler valve closed
9/7/2010	9:56:24 PM	Main Vac valve opened
9/7/2010	9:56:24 PM	Bypass valve opened
9/7/2010	9:56:24 PM	Helium MFC set to  0.000000
9/7/2010	9:56:24 PM	H2 MFC set to  0.000000
9/7/2010	9:56:24 PM	BCl3 MFC set to  0.000000
9/7/2010	9:56:24 PM	PHl3 MFC set to  0.000000
9/7/2010	9:56:24 PM	SiCl4 MFC set to  0.000000
9/7/2010	9:56:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	9:56:24 PM	Tube furnace set to 0
9/7/2010	9:57:24 PM	H2 valve closed
9/7/2010	9:57:24 PM	BCl3 valve closed
9/7/2010	9:57:24 PM	PH3 valve closed
9/7/2010	9:57:24 PM	SiCl4 pre valve closed
9/7/2010	9:57:24 PM	SiCl4 post valve closed
9/7/2010	9:57:24 PM	Bubbler valve closed
9/7/2010	9:57:24 PM	Helium valve opened
9/7/2010	9:57:24 PM	Main Vac valve opened
9/7/2010	9:57:24 PM	Bypass valve opened
9/7/2010	9:57:24 PM	Helium MFC set to  100.000000
9/7/2010	9:57:24 PM	H2 MFC set to  0.000000
9/7/2010	9:57:24 PM	BCl3 MFC set to  0.000000
9/7/2010	9:57:24 PM	PHl3 MFC set to  0.000000
9/7/2010	9:57:24 PM	SiCl4 MFC set to  0.000000
9/7/2010	9:57:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	9:57:24 PM	Tube furnace set to 0
9/7/2010	9:58:24 PM	Helium valve closed
9/7/2010	9:58:24 PM	H2 valve closed
9/7/2010	9:58:24 PM	BCl3 valve closed
9/7/2010	9:58:24 PM	PH3 valve closed
9/7/2010	9:58:24 PM	SiCl4 pre valve closed
9/7/2010	9:58:24 PM	SiCl4 post valve closed
9/7/2010	9:58:24 PM	Bubbler valve closed
9/7/2010	9:58:24 PM	Main Vac valve opened
9/7/2010	9:58:24 PM	Bypass valve opened
9/7/2010	9:58:24 PM	Helium MFC set to  0.000000
9/7/2010	9:58:24 PM	H2 MFC set to  0.000000
9/7/2010	9:58:24 PM	BCl3 MFC set to  0.000000
9/7/2010	9:58:24 PM	PHl3 MFC set to  0.000000
9/7/2010	9:58:24 PM	SiCl4 MFC set to  0.000000
9/7/2010	9:58:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	9:58:24 PM	Tube furnace set to 0
9/7/2010	9:59:24 PM	H2 valve closed
9/7/2010	9:59:24 PM	BCl3 valve closed
9/7/2010	9:59:24 PM	PH3 valve closed
9/7/2010	9:59:24 PM	SiCl4 pre valve closed
9/7/2010	9:59:24 PM	SiCl4 post valve closed
9/7/2010	9:59:24 PM	Bubbler valve closed
9/7/2010	9:59:24 PM	Helium valve opened
9/7/2010	9:59:24 PM	Main Vac valve opened
9/7/2010	9:59:24 PM	Bypass valve opened
9/7/2010	9:59:24 PM	Helium MFC set to  100.000000
9/7/2010	9:59:24 PM	H2 MFC set to  0.000000
9/7/2010	9:59:24 PM	BCl3 MFC set to  0.000000
9/7/2010	9:59:24 PM	PHl3 MFC set to  0.000000
9/7/2010	9:59:24 PM	SiCl4 MFC set to  0.000000
9/7/2010	9:59:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	9:59:24 PM	Tube furnace set to 0
9/7/2010	10:00:24 PM	Helium valve closed
9/7/2010	10:00:24 PM	H2 valve closed
9/7/2010	10:00:24 PM	BCl3 valve closed
9/7/2010	10:00:24 PM	PH3 valve closed
9/7/2010	10:00:24 PM	SiCl4 pre valve closed
9/7/2010	10:00:24 PM	SiCl4 post valve closed
9/7/2010	10:00:24 PM	Bubbler valve closed
9/7/2010	10:00:24 PM	Main Vac valve opened
9/7/2010	10:00:24 PM	Bypass valve opened
9/7/2010	10:00:24 PM	Helium MFC set to  0.000000
9/7/2010	10:00:24 PM	H2 MFC set to  0.000000
9/7/2010	10:00:24 PM	BCl3 MFC set to  0.000000
9/7/2010	10:00:24 PM	PHl3 MFC set to  0.000000
9/7/2010	10:00:24 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:00:24 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:00:25 PM	Tube furnace set to 0
9/7/2010	10:01:25 PM	H2 valve closed
9/7/2010	10:01:25 PM	BCl3 valve closed
9/7/2010	10:01:25 PM	PH3 valve closed
9/7/2010	10:01:25 PM	SiCl4 pre valve closed
9/7/2010	10:01:25 PM	SiCl4 post valve closed
9/7/2010	10:01:25 PM	Bubbler valve closed
9/7/2010	10:01:25 PM	Helium valve opened
9/7/2010	10:01:25 PM	Main Vac valve opened
9/7/2010	10:01:25 PM	Bypass valve opened
9/7/2010	10:01:25 PM	Helium MFC set to  100.000000
9/7/2010	10:01:25 PM	H2 MFC set to  0.000000
9/7/2010	10:01:25 PM	BCl3 MFC set to  0.000000
9/7/2010	10:01:25 PM	PHl3 MFC set to  0.000000
9/7/2010	10:01:25 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:01:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:01:25 PM	Tube furnace set to 0
9/7/2010	10:02:25 PM	Helium valve closed
9/7/2010	10:02:25 PM	H2 valve closed
9/7/2010	10:02:25 PM	BCl3 valve closed
9/7/2010	10:02:25 PM	PH3 valve closed
9/7/2010	10:02:25 PM	SiCl4 pre valve closed
9/7/2010	10:02:25 PM	SiCl4 post valve closed
9/7/2010	10:02:25 PM	Bubbler valve closed
9/7/2010	10:02:25 PM	Main Vac valve opened
9/7/2010	10:02:25 PM	Bypass valve opened
9/7/2010	10:02:25 PM	Helium MFC set to  0.000000
9/7/2010	10:02:25 PM	H2 MFC set to  0.000000
9/7/2010	10:02:25 PM	BCl3 MFC set to  0.000000
9/7/2010	10:02:25 PM	PHl3 MFC set to  0.000000
9/7/2010	10:02:25 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:02:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:02:25 PM	Tube furnace set to 0
9/7/2010	10:03:25 PM	H2 valve closed
9/7/2010	10:03:25 PM	BCl3 valve closed
9/7/2010	10:03:25 PM	PH3 valve closed
9/7/2010	10:03:25 PM	SiCl4 pre valve closed
9/7/2010	10:03:25 PM	SiCl4 post valve closed
9/7/2010	10:03:25 PM	Bubbler valve closed
9/7/2010	10:03:25 PM	Helium valve opened
9/7/2010	10:03:25 PM	Main Vac valve opened
9/7/2010	10:03:25 PM	Bypass valve opened
9/7/2010	10:03:25 PM	Helium MFC set to  100.000000
9/7/2010	10:03:25 PM	H2 MFC set to  0.000000
9/7/2010	10:03:25 PM	BCl3 MFC set to  0.000000
9/7/2010	10:03:25 PM	PHl3 MFC set to  0.000000
9/7/2010	10:03:25 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:03:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:03:25 PM	Tube furnace set to 0
9/7/2010	10:04:25 PM	Helium valve closed
9/7/2010	10:04:25 PM	H2 valve closed
9/7/2010	10:04:25 PM	BCl3 valve closed
9/7/2010	10:04:25 PM	PH3 valve closed
9/7/2010	10:04:25 PM	SiCl4 pre valve closed
9/7/2010	10:04:25 PM	SiCl4 post valve closed
9/7/2010	10:04:25 PM	Bubbler valve closed
9/7/2010	10:04:25 PM	Main Vac valve opened
9/7/2010	10:04:25 PM	Bypass valve opened
9/7/2010	10:04:25 PM	Helium MFC set to  0.000000
9/7/2010	10:04:25 PM	H2 MFC set to  0.000000
9/7/2010	10:04:25 PM	BCl3 MFC set to  0.000000
9/7/2010	10:04:25 PM	PHl3 MFC set to  0.000000
9/7/2010	10:04:25 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:04:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:04:25 PM	Tube furnace set to 0
9/7/2010	10:05:25 PM	H2 valve closed
9/7/2010	10:05:25 PM	BCl3 valve closed
9/7/2010	10:05:25 PM	PH3 valve closed
9/7/2010	10:05:25 PM	SiCl4 pre valve closed
9/7/2010	10:05:25 PM	SiCl4 post valve closed
9/7/2010	10:05:25 PM	Bubbler valve closed
9/7/2010	10:05:25 PM	Helium valve opened
9/7/2010	10:05:25 PM	Main Vac valve opened
9/7/2010	10:05:25 PM	Bypass valve opened
9/7/2010	10:05:25 PM	Helium MFC set to  100.000000
9/7/2010	10:05:25 PM	H2 MFC set to  0.000000
9/7/2010	10:05:25 PM	BCl3 MFC set to  0.000000
9/7/2010	10:05:25 PM	PHl3 MFC set to  0.000000
9/7/2010	10:05:25 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:05:25 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:05:26 PM	Tube furnace set to 0
9/7/2010	10:06:26 PM	Helium valve closed
9/7/2010	10:06:26 PM	H2 valve closed
9/7/2010	10:06:26 PM	BCl3 valve closed
9/7/2010	10:06:26 PM	PH3 valve closed
9/7/2010	10:06:26 PM	SiCl4 pre valve closed
9/7/2010	10:06:26 PM	SiCl4 post valve closed
9/7/2010	10:06:26 PM	Bubbler valve closed
9/7/2010	10:06:26 PM	Main Vac valve opened
9/7/2010	10:06:26 PM	Bypass valve opened
9/7/2010	10:06:26 PM	Helium MFC set to  0.000000
9/7/2010	10:06:26 PM	H2 MFC set to  0.000000
9/7/2010	10:06:26 PM	BCl3 MFC set to  0.000000
9/7/2010	10:06:26 PM	PHl3 MFC set to  0.000000
9/7/2010	10:06:26 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:06:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:06:26 PM	Tube furnace set to 0
9/7/2010	10:07:26 PM	H2 valve closed
9/7/2010	10:07:26 PM	BCl3 valve closed
9/7/2010	10:07:26 PM	PH3 valve closed
9/7/2010	10:07:26 PM	SiCl4 pre valve closed
9/7/2010	10:07:26 PM	SiCl4 post valve closed
9/7/2010	10:07:26 PM	Bubbler valve closed
9/7/2010	10:07:26 PM	Helium valve opened
9/7/2010	10:07:26 PM	Main Vac valve opened
9/7/2010	10:07:26 PM	Bypass valve opened
9/7/2010	10:07:26 PM	Helium MFC set to  100.000000
9/7/2010	10:07:26 PM	H2 MFC set to  0.000000
9/7/2010	10:07:26 PM	BCl3 MFC set to  0.000000
9/7/2010	10:07:26 PM	PHl3 MFC set to  0.000000
9/7/2010	10:07:26 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:07:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:07:26 PM	Tube furnace set to 0
9/7/2010	10:08:26 PM	Helium valve closed
9/7/2010	10:08:26 PM	H2 valve closed
9/7/2010	10:08:26 PM	BCl3 valve closed
9/7/2010	10:08:26 PM	PH3 valve closed
9/7/2010	10:08:26 PM	SiCl4 pre valve closed
9/7/2010	10:08:26 PM	SiCl4 post valve closed
9/7/2010	10:08:26 PM	Bubbler valve closed
9/7/2010	10:08:26 PM	Main Vac valve opened
9/7/2010	10:08:26 PM	Bypass valve opened
9/7/2010	10:08:26 PM	Helium MFC set to  0.000000
9/7/2010	10:08:26 PM	H2 MFC set to  0.000000
9/7/2010	10:08:26 PM	BCl3 MFC set to  0.000000
9/7/2010	10:08:26 PM	PHl3 MFC set to  0.000000
9/7/2010	10:08:26 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:08:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:08:26 PM	Tube furnace set to 0
9/7/2010	10:09:26 PM	H2 valve closed
9/7/2010	10:09:26 PM	BCl3 valve closed
9/7/2010	10:09:26 PM	PH3 valve closed
9/7/2010	10:09:26 PM	SiCl4 pre valve closed
9/7/2010	10:09:26 PM	SiCl4 post valve closed
9/7/2010	10:09:26 PM	Bubbler valve closed
9/7/2010	10:09:26 PM	Helium valve opened
9/7/2010	10:09:26 PM	Main Vac valve opened
9/7/2010	10:09:26 PM	Bypass valve opened
9/7/2010	10:09:26 PM	Helium MFC set to  100.000000
9/7/2010	10:09:26 PM	H2 MFC set to  0.000000
9/7/2010	10:09:26 PM	BCl3 MFC set to  0.000000
9/7/2010	10:09:26 PM	PHl3 MFC set to  0.000000
9/7/2010	10:09:26 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:09:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:09:26 PM	Tube furnace set to 0
9/7/2010	10:10:26 PM	Helium valve closed
9/7/2010	10:10:26 PM	H2 valve closed
9/7/2010	10:10:26 PM	BCl3 valve closed
9/7/2010	10:10:26 PM	PH3 valve closed
9/7/2010	10:10:26 PM	SiCl4 pre valve closed
9/7/2010	10:10:26 PM	SiCl4 post valve closed
9/7/2010	10:10:26 PM	Bubbler valve closed
9/7/2010	10:10:26 PM	Main Vac valve opened
9/7/2010	10:10:26 PM	Bypass valve opened
9/7/2010	10:10:26 PM	Helium MFC set to  0.000000
9/7/2010	10:10:26 PM	H2 MFC set to  0.000000
9/7/2010	10:10:26 PM	BCl3 MFC set to  0.000000
9/7/2010	10:10:26 PM	PHl3 MFC set to  0.000000
9/7/2010	10:10:26 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:10:26 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:10:27 PM	Tube furnace set to 0
9/7/2010	10:11:27 PM	H2 valve closed
9/7/2010	10:11:27 PM	BCl3 valve closed
9/7/2010	10:11:27 PM	PH3 valve closed
9/7/2010	10:11:27 PM	SiCl4 pre valve closed
9/7/2010	10:11:27 PM	SiCl4 post valve closed
9/7/2010	10:11:27 PM	Bubbler valve closed
9/7/2010	10:11:27 PM	Helium valve opened
9/7/2010	10:11:27 PM	Main Vac valve opened
9/7/2010	10:11:27 PM	Bypass valve opened
9/7/2010	10:11:27 PM	Helium MFC set to  100.000000
9/7/2010	10:11:27 PM	H2 MFC set to  0.000000
9/7/2010	10:11:27 PM	BCl3 MFC set to  0.000000
9/7/2010	10:11:27 PM	PHl3 MFC set to  0.000000
9/7/2010	10:11:27 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:11:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:11:27 PM	Tube furnace set to 0
9/7/2010	10:12:27 PM	Helium valve closed
9/7/2010	10:12:27 PM	H2 valve closed
9/7/2010	10:12:27 PM	BCl3 valve closed
9/7/2010	10:12:27 PM	PH3 valve closed
9/7/2010	10:12:27 PM	SiCl4 pre valve closed
9/7/2010	10:12:27 PM	SiCl4 post valve closed
9/7/2010	10:12:27 PM	Bubbler valve closed
9/7/2010	10:12:27 PM	Main Vac valve opened
9/7/2010	10:12:27 PM	Bypass valve opened
9/7/2010	10:12:27 PM	Helium MFC set to  0.000000
9/7/2010	10:12:27 PM	H2 MFC set to  0.000000
9/7/2010	10:12:27 PM	BCl3 MFC set to  0.000000
9/7/2010	10:12:27 PM	PHl3 MFC set to  0.000000
9/7/2010	10:12:27 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:12:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:12:27 PM	Tube furnace set to 0
9/7/2010	10:13:27 PM	H2 valve closed
9/7/2010	10:13:27 PM	BCl3 valve closed
9/7/2010	10:13:27 PM	PH3 valve closed
9/7/2010	10:13:27 PM	SiCl4 pre valve closed
9/7/2010	10:13:27 PM	SiCl4 post valve closed
9/7/2010	10:13:27 PM	Bubbler valve closed
9/7/2010	10:13:27 PM	Helium valve opened
9/7/2010	10:13:27 PM	Main Vac valve opened
9/7/2010	10:13:27 PM	Bypass valve opened
9/7/2010	10:13:27 PM	Helium MFC set to  100.000000
9/7/2010	10:13:27 PM	H2 MFC set to  0.000000
9/7/2010	10:13:27 PM	BCl3 MFC set to  0.000000
9/7/2010	10:13:27 PM	PHl3 MFC set to  0.000000
9/7/2010	10:13:27 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:13:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:13:27 PM	Tube furnace set to 0
9/7/2010	10:14:27 PM	Helium valve closed
9/7/2010	10:14:27 PM	H2 valve closed
9/7/2010	10:14:27 PM	BCl3 valve closed
9/7/2010	10:14:27 PM	PH3 valve closed
9/7/2010	10:14:27 PM	SiCl4 pre valve closed
9/7/2010	10:14:27 PM	SiCl4 post valve closed
9/7/2010	10:14:27 PM	Bubbler valve closed
9/7/2010	10:14:27 PM	Main Vac valve opened
9/7/2010	10:14:27 PM	Bypass valve opened
9/7/2010	10:14:27 PM	Helium MFC set to  0.000000
9/7/2010	10:14:27 PM	H2 MFC set to  0.000000
9/7/2010	10:14:27 PM	BCl3 MFC set to  0.000000
9/7/2010	10:14:27 PM	PHl3 MFC set to  0.000000
9/7/2010	10:14:27 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:14:27 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:14:28 PM	Tube furnace set to 0
9/7/2010	10:15:28 PM	H2 valve closed
9/7/2010	10:15:28 PM	BCl3 valve closed
9/7/2010	10:15:28 PM	PH3 valve closed
9/7/2010	10:15:28 PM	SiCl4 pre valve closed
9/7/2010	10:15:28 PM	SiCl4 post valve closed
9/7/2010	10:15:28 PM	Bubbler valve closed
9/7/2010	10:15:28 PM	Helium valve opened
9/7/2010	10:15:28 PM	Main Vac valve opened
9/7/2010	10:15:28 PM	Bypass valve opened
9/7/2010	10:15:28 PM	Helium MFC set to  100.000000
9/7/2010	10:15:28 PM	H2 MFC set to  0.000000
9/7/2010	10:15:28 PM	BCl3 MFC set to  0.000000
9/7/2010	10:15:28 PM	PHl3 MFC set to  0.000000
9/7/2010	10:15:28 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:15:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:15:28 PM	Tube furnace set to 0
9/7/2010	10:16:28 PM	Helium valve closed
9/7/2010	10:16:28 PM	H2 valve closed
9/7/2010	10:16:28 PM	BCl3 valve closed
9/7/2010	10:16:28 PM	PH3 valve closed
9/7/2010	10:16:28 PM	SiCl4 pre valve closed
9/7/2010	10:16:28 PM	SiCl4 post valve closed
9/7/2010	10:16:28 PM	Bubbler valve closed
9/7/2010	10:16:28 PM	Main Vac valve opened
9/7/2010	10:16:28 PM	Bypass valve opened
9/7/2010	10:16:28 PM	Helium MFC set to  0.000000
9/7/2010	10:16:28 PM	H2 MFC set to  0.000000
9/7/2010	10:16:28 PM	BCl3 MFC set to  0.000000
9/7/2010	10:16:28 PM	PHl3 MFC set to  0.000000
9/7/2010	10:16:28 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:16:28 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:16:28 PM	Tube furnace set to 100
9/7/2010	10:16:29 PM	Run finished at 10:16 PM
9/7/2010	10:22:54 PM	Recipe started at 10:22 PM
9/7/2010	10:22:54 PM	Helium valve closed
9/7/2010	10:22:54 PM	H2 valve closed
9/7/2010	10:22:54 PM	BCl3 valve closed
9/7/2010	10:22:54 PM	PH3 valve closed
9/7/2010	10:22:54 PM	SiCl4 pre valve closed
9/7/2010	10:22:54 PM	SiCl4 post valve closed
9/7/2010	10:22:54 PM	Main Vac valve closed
9/7/2010	10:22:54 PM	Bubbler valve closed
9/7/2010	10:22:54 PM	Bypass valve opened
9/7/2010	10:22:54 PM	Helium MFC set to  0.000000
9/7/2010	10:22:54 PM	H2 MFC set to  0.000000
9/7/2010	10:22:54 PM	BCl3 MFC set to  0.000000
9/7/2010	10:22:54 PM	PHl3 MFC set to  0.000000
9/7/2010	10:22:54 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:22:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:22:54 PM	Tube furnace set to 0
9/7/2010	10:22:54 PM	Helium valve closed
9/7/2010	10:22:54 PM	H2 valve closed
9/7/2010	10:22:54 PM	BCl3 valve closed
9/7/2010	10:22:54 PM	PH3 valve closed
9/7/2010	10:22:54 PM	SiCl4 pre valve closed
9/7/2010	10:22:54 PM	SiCl4 post valve closed
9/7/2010	10:22:54 PM	Bubbler valve closed
9/7/2010	10:22:54 PM	Main Vac valve opened
9/7/2010	10:22:54 PM	Bypass valve opened
9/7/2010	10:22:54 PM	Helium MFC set to  0.000000
9/7/2010	10:22:54 PM	H2 MFC set to  0.000000
9/7/2010	10:22:54 PM	BCl3 MFC set to  0.000000
9/7/2010	10:22:54 PM	PHl3 MFC set to  0.000000
9/7/2010	10:22:54 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:22:54 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:22:55 PM	Tube furnace set to 0
9/7/2010	10:23:00 PM	H2 valve closed
9/7/2010	10:23:00 PM	BCl3 valve closed
9/7/2010	10:23:00 PM	PH3 valve closed
9/7/2010	10:23:00 PM	SiCl4 pre valve closed
9/7/2010	10:23:00 PM	SiCl4 post valve closed
9/7/2010	10:23:00 PM	Bubbler valve closed
9/7/2010	10:23:00 PM	Helium valve opened
9/7/2010	10:23:00 PM	Main Vac valve opened
9/7/2010	10:23:00 PM	Bypass valve opened
9/7/2010	10:23:00 PM	Helium MFC set to  100.000000
9/7/2010	10:23:00 PM	H2 MFC set to  0.000000
9/7/2010	10:23:00 PM	BCl3 MFC set to  0.000000
9/7/2010	10:23:00 PM	PHl3 MFC set to  0.000000
9/7/2010	10:23:00 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:23:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:23:00 PM	Tube furnace set to 0
9/7/2010	10:24:00 PM	Helium valve closed
9/7/2010	10:24:00 PM	H2 valve closed
9/7/2010	10:24:00 PM	BCl3 valve closed
9/7/2010	10:24:00 PM	PH3 valve closed
9/7/2010	10:24:00 PM	SiCl4 pre valve closed
9/7/2010	10:24:00 PM	SiCl4 post valve closed
9/7/2010	10:24:00 PM	Bubbler valve closed
9/7/2010	10:24:00 PM	Main Vac valve opened
9/7/2010	10:24:00 PM	Bypass valve opened
9/7/2010	10:24:00 PM	Helium MFC set to  0.000000
9/7/2010	10:24:00 PM	H2 MFC set to  0.000000
9/7/2010	10:24:00 PM	BCl3 MFC set to  0.000000
9/7/2010	10:24:00 PM	PHl3 MFC set to  0.000000
9/7/2010	10:24:00 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:24:00 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:24:00 PM	Tube furnace set to 0
9/7/2010	10:25:01 PM	H2 valve closed
9/7/2010	10:25:01 PM	BCl3 valve closed
9/7/2010	10:25:01 PM	PH3 valve closed
9/7/2010	10:25:01 PM	SiCl4 pre valve closed
9/7/2010	10:25:01 PM	SiCl4 post valve closed
9/7/2010	10:25:01 PM	Bubbler valve closed
9/7/2010	10:25:01 PM	Helium valve opened
9/7/2010	10:25:01 PM	Main Vac valve opened
9/7/2010	10:25:01 PM	Bypass valve opened
9/7/2010	10:25:01 PM	Helium MFC set to  100.000000
9/7/2010	10:25:01 PM	H2 MFC set to  0.000000
9/7/2010	10:25:01 PM	BCl3 MFC set to  0.000000
9/7/2010	10:25:01 PM	PHl3 MFC set to  0.000000
9/7/2010	10:25:01 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:25:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:25:01 PM	Tube furnace set to 0
9/7/2010	10:26:01 PM	Helium valve closed
9/7/2010	10:26:01 PM	H2 valve closed
9/7/2010	10:26:01 PM	BCl3 valve closed
9/7/2010	10:26:01 PM	PH3 valve closed
9/7/2010	10:26:01 PM	SiCl4 pre valve closed
9/7/2010	10:26:01 PM	SiCl4 post valve closed
9/7/2010	10:26:01 PM	Bubbler valve closed
9/7/2010	10:26:01 PM	Main Vac valve opened
9/7/2010	10:26:01 PM	Bypass valve opened
9/7/2010	10:26:01 PM	Helium MFC set to  0.000000
9/7/2010	10:26:01 PM	H2 MFC set to  0.000000
9/7/2010	10:26:01 PM	BCl3 MFC set to  0.000000
9/7/2010	10:26:01 PM	PHl3 MFC set to  0.000000
9/7/2010	10:26:01 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:26:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:26:01 PM	Tube furnace set to 0
9/7/2010	10:27:01 PM	H2 valve closed
9/7/2010	10:27:01 PM	BCl3 valve closed
9/7/2010	10:27:01 PM	PH3 valve closed
9/7/2010	10:27:01 PM	SiCl4 pre valve closed
9/7/2010	10:27:01 PM	SiCl4 post valve closed
9/7/2010	10:27:01 PM	Bubbler valve closed
9/7/2010	10:27:01 PM	Helium valve opened
9/7/2010	10:27:01 PM	Main Vac valve opened
9/7/2010	10:27:01 PM	Bypass valve opened
9/7/2010	10:27:01 PM	Helium MFC set to  100.000000
9/7/2010	10:27:01 PM	H2 MFC set to  0.000000
9/7/2010	10:27:01 PM	BCl3 MFC set to  0.000000
9/7/2010	10:27:01 PM	PHl3 MFC set to  0.000000
9/7/2010	10:27:01 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:27:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:27:01 PM	Tube furnace set to 0
9/7/2010	10:28:01 PM	Helium valve closed
9/7/2010	10:28:01 PM	H2 valve closed
9/7/2010	10:28:01 PM	BCl3 valve closed
9/7/2010	10:28:01 PM	PH3 valve closed
9/7/2010	10:28:01 PM	SiCl4 pre valve closed
9/7/2010	10:28:01 PM	SiCl4 post valve closed
9/7/2010	10:28:01 PM	Bubbler valve closed
9/7/2010	10:28:01 PM	Main Vac valve opened
9/7/2010	10:28:01 PM	Bypass valve opened
9/7/2010	10:28:01 PM	Helium MFC set to  0.000000
9/7/2010	10:28:01 PM	H2 MFC set to  0.000000
9/7/2010	10:28:01 PM	BCl3 MFC set to  0.000000
9/7/2010	10:28:01 PM	PHl3 MFC set to  0.000000
9/7/2010	10:28:01 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:28:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:28:01 PM	Tube furnace set to 0
9/7/2010	10:29:01 PM	H2 valve closed
9/7/2010	10:29:01 PM	BCl3 valve closed
9/7/2010	10:29:01 PM	PH3 valve closed
9/7/2010	10:29:01 PM	SiCl4 pre valve closed
9/7/2010	10:29:01 PM	SiCl4 post valve closed
9/7/2010	10:29:01 PM	Bubbler valve closed
9/7/2010	10:29:01 PM	Helium valve opened
9/7/2010	10:29:01 PM	Main Vac valve opened
9/7/2010	10:29:01 PM	Bypass valve opened
9/7/2010	10:29:01 PM	Helium MFC set to  100.000000
9/7/2010	10:29:01 PM	H2 MFC set to  0.000000
9/7/2010	10:29:01 PM	BCl3 MFC set to  0.000000
9/7/2010	10:29:01 PM	PHl3 MFC set to  0.000000
9/7/2010	10:29:01 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:29:01 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:29:02 PM	Tube furnace set to 0
9/7/2010	10:30:02 PM	Helium valve closed
9/7/2010	10:30:02 PM	H2 valve closed
9/7/2010	10:30:02 PM	BCl3 valve closed
9/7/2010	10:30:02 PM	PH3 valve closed
9/7/2010	10:30:02 PM	SiCl4 pre valve closed
9/7/2010	10:30:02 PM	SiCl4 post valve closed
9/7/2010	10:30:02 PM	Bubbler valve closed
9/7/2010	10:30:02 PM	Main Vac valve opened
9/7/2010	10:30:02 PM	Bypass valve opened
9/7/2010	10:30:02 PM	Helium MFC set to  0.000000
9/7/2010	10:30:02 PM	H2 MFC set to  0.000000
9/7/2010	10:30:02 PM	BCl3 MFC set to  0.000000
9/7/2010	10:30:02 PM	PHl3 MFC set to  0.000000
9/7/2010	10:30:02 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:30:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:30:02 PM	Tube furnace set to 0
9/7/2010	10:31:02 PM	H2 valve closed
9/7/2010	10:31:02 PM	BCl3 valve closed
9/7/2010	10:31:02 PM	PH3 valve closed
9/7/2010	10:31:02 PM	SiCl4 pre valve closed
9/7/2010	10:31:02 PM	SiCl4 post valve closed
9/7/2010	10:31:02 PM	Bubbler valve closed
9/7/2010	10:31:02 PM	Helium valve opened
9/7/2010	10:31:02 PM	Main Vac valve opened
9/7/2010	10:31:02 PM	Bypass valve opened
9/7/2010	10:31:02 PM	Helium MFC set to  100.000000
9/7/2010	10:31:02 PM	H2 MFC set to  0.000000
9/7/2010	10:31:02 PM	BCl3 MFC set to  0.000000
9/7/2010	10:31:02 PM	PHl3 MFC set to  0.000000
9/7/2010	10:31:02 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:31:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:31:02 PM	Tube furnace set to 0
9/7/2010	10:32:02 PM	Helium valve closed
9/7/2010	10:32:02 PM	H2 valve closed
9/7/2010	10:32:02 PM	BCl3 valve closed
9/7/2010	10:32:02 PM	PH3 valve closed
9/7/2010	10:32:02 PM	SiCl4 pre valve closed
9/7/2010	10:32:02 PM	SiCl4 post valve closed
9/7/2010	10:32:02 PM	Bubbler valve closed
9/7/2010	10:32:02 PM	Main Vac valve opened
9/7/2010	10:32:02 PM	Bypass valve opened
9/7/2010	10:32:02 PM	Helium MFC set to  0.000000
9/7/2010	10:32:02 PM	H2 MFC set to  0.000000
9/7/2010	10:32:02 PM	BCl3 MFC set to  0.000000
9/7/2010	10:32:02 PM	PHl3 MFC set to  0.000000
9/7/2010	10:32:02 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:32:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:32:02 PM	Tube furnace set to 0
9/7/2010	10:33:02 PM	H2 valve closed
9/7/2010	10:33:02 PM	BCl3 valve closed
9/7/2010	10:33:02 PM	PH3 valve closed
9/7/2010	10:33:02 PM	SiCl4 pre valve closed
9/7/2010	10:33:02 PM	SiCl4 post valve closed
9/7/2010	10:33:02 PM	Bubbler valve closed
9/7/2010	10:33:02 PM	Helium valve opened
9/7/2010	10:33:02 PM	Main Vac valve opened
9/7/2010	10:33:02 PM	Bypass valve opened
9/7/2010	10:33:02 PM	Helium MFC set to  100.000000
9/7/2010	10:33:02 PM	H2 MFC set to  0.000000
9/7/2010	10:33:02 PM	BCl3 MFC set to  0.000000
9/7/2010	10:33:02 PM	PHl3 MFC set to  0.000000
9/7/2010	10:33:02 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:33:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:33:02 PM	Tube furnace set to 0
9/7/2010	10:34:02 PM	Helium valve closed
9/7/2010	10:34:02 PM	H2 valve closed
9/7/2010	10:34:02 PM	BCl3 valve closed
9/7/2010	10:34:02 PM	PH3 valve closed
9/7/2010	10:34:02 PM	SiCl4 pre valve closed
9/7/2010	10:34:02 PM	SiCl4 post valve closed
9/7/2010	10:34:02 PM	Bubbler valve closed
9/7/2010	10:34:02 PM	Main Vac valve opened
9/7/2010	10:34:02 PM	Bypass valve opened
9/7/2010	10:34:02 PM	Helium MFC set to  0.000000
9/7/2010	10:34:02 PM	H2 MFC set to  0.000000
9/7/2010	10:34:02 PM	BCl3 MFC set to  0.000000
9/7/2010	10:34:02 PM	PHl3 MFC set to  0.000000
9/7/2010	10:34:02 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:34:02 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:34:03 PM	Tube furnace set to 0
9/7/2010	10:35:03 PM	H2 valve closed
9/7/2010	10:35:03 PM	BCl3 valve closed
9/7/2010	10:35:03 PM	PH3 valve closed
9/7/2010	10:35:03 PM	SiCl4 pre valve closed
9/7/2010	10:35:03 PM	SiCl4 post valve closed
9/7/2010	10:35:03 PM	Bubbler valve closed
9/7/2010	10:35:03 PM	Helium valve opened
9/7/2010	10:35:03 PM	Main Vac valve opened
9/7/2010	10:35:03 PM	Bypass valve opened
9/7/2010	10:35:03 PM	Helium MFC set to  100.000000
9/7/2010	10:35:03 PM	H2 MFC set to  0.000000
9/7/2010	10:35:03 PM	BCl3 MFC set to  0.000000
9/7/2010	10:35:03 PM	PHl3 MFC set to  0.000000
9/7/2010	10:35:03 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:35:03 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:35:03 PM	Tube furnace set to 0
9/7/2010	10:36:03 PM	Helium valve closed
9/7/2010	10:36:03 PM	H2 valve closed
9/7/2010	10:36:03 PM	BCl3 valve closed
9/7/2010	10:36:03 PM	PH3 valve closed
9/7/2010	10:36:03 PM	SiCl4 pre valve closed
9/7/2010	10:36:03 PM	SiCl4 post valve closed
9/7/2010	10:36:03 PM	Bubbler valve closed
9/7/2010	10:36:03 PM	Main Vac valve opened
9/7/2010	10:36:03 PM	Bypass valve opened
9/7/2010	10:36:03 PM	Helium MFC set to  0.000000
9/7/2010	10:36:03 PM	H2 MFC set to  0.000000
9/7/2010	10:36:03 PM	BCl3 MFC set to  0.000000
9/7/2010	10:36:03 PM	PHl3 MFC set to  0.000000
9/7/2010	10:36:03 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:36:03 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:36:03 PM	Tube furnace set to 0
9/7/2010	10:37:03 PM	H2 valve closed
9/7/2010	10:37:03 PM	BCl3 valve closed
9/7/2010	10:37:03 PM	PH3 valve closed
9/7/2010	10:37:03 PM	SiCl4 pre valve closed
9/7/2010	10:37:03 PM	SiCl4 post valve closed
9/7/2010	10:37:03 PM	Bubbler valve closed
9/7/2010	10:37:03 PM	Helium valve opened
9/7/2010	10:37:03 PM	Main Vac valve opened
9/7/2010	10:37:03 PM	Bypass valve opened
9/7/2010	10:37:03 PM	Helium MFC set to  100.000000
9/7/2010	10:37:03 PM	H2 MFC set to  0.000000
9/7/2010	10:37:03 PM	BCl3 MFC set to  0.000000
9/7/2010	10:37:03 PM	PHl3 MFC set to  0.000000
9/7/2010	10:37:03 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:37:03 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:37:03 PM	Tube furnace set to 0
9/7/2010	10:38:03 PM	Helium valve closed
9/7/2010	10:38:03 PM	H2 valve closed
9/7/2010	10:38:03 PM	BCl3 valve closed
9/7/2010	10:38:03 PM	PH3 valve closed
9/7/2010	10:38:03 PM	SiCl4 pre valve closed
9/7/2010	10:38:03 PM	SiCl4 post valve closed
9/7/2010	10:38:03 PM	Bubbler valve closed
9/7/2010	10:38:03 PM	Main Vac valve opened
9/7/2010	10:38:03 PM	Bypass valve opened
9/7/2010	10:38:03 PM	Helium MFC set to  0.000000
9/7/2010	10:38:03 PM	H2 MFC set to  0.000000
9/7/2010	10:38:03 PM	BCl3 MFC set to  0.000000
9/7/2010	10:38:03 PM	PHl3 MFC set to  0.000000
9/7/2010	10:38:03 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:38:03 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:38:03 PM	Tube furnace set to 0
9/7/2010	10:39:03 PM	H2 valve closed
9/7/2010	10:39:03 PM	BCl3 valve closed
9/7/2010	10:39:03 PM	PH3 valve closed
9/7/2010	10:39:03 PM	SiCl4 pre valve closed
9/7/2010	10:39:03 PM	SiCl4 post valve closed
9/7/2010	10:39:03 PM	Bubbler valve closed
9/7/2010	10:39:03 PM	Helium valve opened
9/7/2010	10:39:03 PM	Main Vac valve opened
9/7/2010	10:39:03 PM	Bypass valve opened
9/7/2010	10:39:03 PM	Helium MFC set to  100.000000
9/7/2010	10:39:03 PM	H2 MFC set to  0.000000
9/7/2010	10:39:03 PM	BCl3 MFC set to  0.000000
9/7/2010	10:39:03 PM	PHl3 MFC set to  0.000000
9/7/2010	10:39:03 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:39:03 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:39:04 PM	Tube furnace set to 0
9/7/2010	10:40:04 PM	Helium valve closed
9/7/2010	10:40:04 PM	H2 valve closed
9/7/2010	10:40:04 PM	BCl3 valve closed
9/7/2010	10:40:04 PM	PH3 valve closed
9/7/2010	10:40:04 PM	SiCl4 pre valve closed
9/7/2010	10:40:04 PM	SiCl4 post valve closed
9/7/2010	10:40:04 PM	Bubbler valve closed
9/7/2010	10:40:04 PM	Main Vac valve opened
9/7/2010	10:40:04 PM	Bypass valve opened
9/7/2010	10:40:04 PM	Helium MFC set to  0.000000
9/7/2010	10:40:04 PM	H2 MFC set to  0.000000
9/7/2010	10:40:04 PM	BCl3 MFC set to  0.000000
9/7/2010	10:40:04 PM	PHl3 MFC set to  0.000000
9/7/2010	10:40:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:40:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:40:04 PM	Tube furnace set to 0
9/7/2010	10:41:04 PM	H2 valve closed
9/7/2010	10:41:04 PM	BCl3 valve closed
9/7/2010	10:41:04 PM	PH3 valve closed
9/7/2010	10:41:04 PM	SiCl4 pre valve closed
9/7/2010	10:41:04 PM	SiCl4 post valve closed
9/7/2010	10:41:04 PM	Bubbler valve closed
9/7/2010	10:41:04 PM	Helium valve opened
9/7/2010	10:41:04 PM	Main Vac valve opened
9/7/2010	10:41:04 PM	Bypass valve opened
9/7/2010	10:41:04 PM	Helium MFC set to  100.000000
9/7/2010	10:41:04 PM	H2 MFC set to  0.000000
9/7/2010	10:41:04 PM	BCl3 MFC set to  0.000000
9/7/2010	10:41:04 PM	PHl3 MFC set to  0.000000
9/7/2010	10:41:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:41:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:41:04 PM	Tube furnace set to 0
9/7/2010	10:42:04 PM	Helium valve closed
9/7/2010	10:42:04 PM	H2 valve closed
9/7/2010	10:42:04 PM	BCl3 valve closed
9/7/2010	10:42:04 PM	PH3 valve closed
9/7/2010	10:42:04 PM	SiCl4 pre valve closed
9/7/2010	10:42:04 PM	SiCl4 post valve closed
9/7/2010	10:42:04 PM	Bubbler valve closed
9/7/2010	10:42:04 PM	Main Vac valve opened
9/7/2010	10:42:04 PM	Bypass valve opened
9/7/2010	10:42:04 PM	Helium MFC set to  0.000000
9/7/2010	10:42:04 PM	H2 MFC set to  0.000000
9/7/2010	10:42:04 PM	BCl3 MFC set to  0.000000
9/7/2010	10:42:04 PM	PHl3 MFC set to  0.000000
9/7/2010	10:42:04 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:42:04 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:42:04 PM	Tube furnace set to 100
9/7/2010	10:42:05 PM	Run finished at 10:42 PM
9/7/2010	10:42:44 PM	Bypass valve closed
9/7/2010	10:42:44 PM	Main Vac valve closed
9/7/2010	10:42:56 PM	Bypass valve opened
9/7/2010	10:42:56 PM	Main Vac valve opened
9/7/2010	10:44:18 PM	Helium MFC set to  100.000000
9/7/2010	10:44:20 PM	Helium valve opened
9/7/2010	10:44:27 PM	Helium valve closed
9/7/2010	10:45:36 PM	Recipe started at 10:45 PM
9/7/2010	10:45:36 PM	Helium valve closed
9/7/2010	10:45:36 PM	BCl3 valve closed
9/7/2010	10:45:36 PM	PH3 valve closed
9/7/2010	10:45:36 PM	SiCl4 pre valve closed
9/7/2010	10:45:36 PM	SiCl4 post valve closed
9/7/2010	10:45:36 PM	Main Vac valve closed
9/7/2010	10:45:36 PM	Bypass valve closed
9/7/2010	10:45:36 PM	Bubbler valve closed
9/7/2010	10:45:36 PM	H2 valve opened
9/7/2010	10:45:36 PM	Helium MFC set to  0.000000
9/7/2010	10:45:36 PM	H2 MFC set to  500.000000
9/7/2010	10:45:36 PM	BCl3 MFC set to  0.000000
9/7/2010	10:45:36 PM	PHl3 MFC set to  0.000000
9/7/2010	10:45:36 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:45:36 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:45:37 PM	Tube furnace set to 0
9/7/2010	10:46:56 PM	Helium valve closed
9/7/2010	10:46:56 PM	BCl3 valve closed
9/7/2010	10:46:56 PM	PH3 valve closed
9/7/2010	10:46:56 PM	SiCl4 pre valve closed
9/7/2010	10:46:56 PM	SiCl4 post valve closed
9/7/2010	10:46:56 PM	Main Vac valve closed
9/7/2010	10:46:56 PM	Bypass valve closed
9/7/2010	10:46:56 PM	H2 valve opened
9/7/2010	10:46:56 PM	Bubbler valve opened
9/7/2010	10:46:56 PM	Helium MFC set to  0.000000
9/7/2010	10:46:56 PM	H2 MFC set to  500.000000
9/7/2010	10:46:56 PM	BCl3 MFC set to  0.000000
9/7/2010	10:46:56 PM	PHl3 MFC set to  0.000000
9/7/2010	10:46:56 PM	SiCl4 MFC set to  0.000000
9/7/2010	10:46:56 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	10:46:57 PM	Tube furnace set to 1000
9/7/2010	11:06:57 PM	Helium valve closed
9/7/2010	11:06:57 PM	BCl3 valve closed
9/7/2010	11:06:57 PM	PH3 valve closed
9/7/2010	11:06:57 PM	Main Vac valve closed
9/7/2010	11:06:57 PM	Bypass valve closed
9/7/2010	11:06:57 PM	H2 valve opened
9/7/2010	11:06:57 PM	SiCl4 pre valve opened
9/7/2010	11:06:57 PM	SiCl4 post valve opened
9/7/2010	11:06:57 PM	Bubbler valve opened
9/7/2010	11:06:57 PM	Helium MFC set to  0.000000
9/7/2010	11:06:57 PM	H2 MFC set to  500.000000
9/7/2010	11:06:57 PM	BCl3 MFC set to  0.000000
9/7/2010	11:06:57 PM	PHl3 MFC set to  0.000000
9/7/2010	11:06:57 PM	SiCl4 MFC set to  50.000000
9/7/2010	11:06:57 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:06:57 PM	Tube furnace set to 1000
9/7/2010	11:26:57 PM	H2 valve closed
9/7/2010	11:26:57 PM	BCl3 valve closed
9/7/2010	11:26:57 PM	PH3 valve closed
9/7/2010	11:26:57 PM	SiCl4 pre valve closed
9/7/2010	11:26:57 PM	SiCl4 post valve closed
9/7/2010	11:26:57 PM	Main Vac valve closed
9/7/2010	11:26:57 PM	Bypass valve closed
9/7/2010	11:26:57 PM	Helium valve opened
9/7/2010	11:26:57 PM	Bubbler valve opened
9/7/2010	11:26:57 PM	Helium MFC set to  500.000000
9/7/2010	11:26:57 PM	H2 MFC set to  0.000000
9/7/2010	11:26:57 PM	BCl3 MFC set to  0.000000
9/7/2010	11:26:57 PM	PHl3 MFC set to  0.000000
9/7/2010	11:26:57 PM	SiCl4 MFC set to  0.000000
9/7/2010	11:26:57 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:26:57 PM	Tube furnace set to 950
9/7/2010	11:31:57 PM	H2 valve closed
9/7/2010	11:31:57 PM	BCl3 valve closed
9/7/2010	11:31:57 PM	PH3 valve closed
9/7/2010	11:31:57 PM	SiCl4 pre valve closed
9/7/2010	11:31:57 PM	SiCl4 post valve closed
9/7/2010	11:31:57 PM	Main Vac valve closed
9/7/2010	11:31:57 PM	Bypass valve closed
9/7/2010	11:31:57 PM	Helium valve opened
9/7/2010	11:31:57 PM	Bubbler valve opened
9/7/2010	11:31:57 PM	Helium MFC set to  500.000000
9/7/2010	11:31:57 PM	H2 MFC set to  0.000000
9/7/2010	11:31:57 PM	BCl3 MFC set to  0.000000
9/7/2010	11:31:57 PM	PHl3 MFC set to  0.000000
9/7/2010	11:31:57 PM	SiCl4 MFC set to  0.000000
9/7/2010	11:31:57 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:31:57 PM	Tube furnace set to 900
9/7/2010	11:36:57 PM	H2 valve closed
9/7/2010	11:36:57 PM	BCl3 valve closed
9/7/2010	11:36:57 PM	PH3 valve closed
9/7/2010	11:36:57 PM	SiCl4 pre valve closed
9/7/2010	11:36:57 PM	SiCl4 post valve closed
9/7/2010	11:36:57 PM	Main Vac valve closed
9/7/2010	11:36:57 PM	Bypass valve closed
9/7/2010	11:36:57 PM	Helium valve opened
9/7/2010	11:36:57 PM	Bubbler valve opened
9/7/2010	11:36:57 PM	Helium MFC set to  500.000000
9/7/2010	11:36:57 PM	H2 MFC set to  0.000000
9/7/2010	11:36:57 PM	BCl3 MFC set to  0.000000
9/7/2010	11:36:57 PM	PHl3 MFC set to  0.000000
9/7/2010	11:36:57 PM	SiCl4 MFC set to  0.000000
9/7/2010	11:36:57 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:36:58 PM	Tube furnace set to 850
9/7/2010	11:41:58 PM	H2 valve closed
9/7/2010	11:41:58 PM	BCl3 valve closed
9/7/2010	11:41:58 PM	PH3 valve closed
9/7/2010	11:41:58 PM	SiCl4 pre valve closed
9/7/2010	11:41:58 PM	SiCl4 post valve closed
9/7/2010	11:41:58 PM	Main Vac valve closed
9/7/2010	11:41:58 PM	Bypass valve closed
9/7/2010	11:41:58 PM	Helium valve opened
9/7/2010	11:41:58 PM	Bubbler valve opened
9/7/2010	11:41:58 PM	Helium MFC set to  500.000000
9/7/2010	11:41:58 PM	H2 MFC set to  0.000000
9/7/2010	11:41:58 PM	BCl3 MFC set to  0.000000
9/7/2010	11:41:58 PM	PHl3 MFC set to  0.000000
9/7/2010	11:41:58 PM	SiCl4 MFC set to  0.000000
9/7/2010	11:41:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:41:58 PM	Tube furnace set to 800
9/7/2010	11:46:58 PM	H2 valve closed
9/7/2010	11:46:58 PM	BCl3 valve closed
9/7/2010	11:46:58 PM	PH3 valve closed
9/7/2010	11:46:58 PM	SiCl4 pre valve closed
9/7/2010	11:46:58 PM	SiCl4 post valve closed
9/7/2010	11:46:58 PM	Main Vac valve closed
9/7/2010	11:46:58 PM	Bypass valve closed
9/7/2010	11:46:58 PM	Helium valve opened
9/7/2010	11:46:58 PM	Bubbler valve opened
9/7/2010	11:46:58 PM	Helium MFC set to  500.000000
9/7/2010	11:46:58 PM	H2 MFC set to  0.000000
9/7/2010	11:46:58 PM	BCl3 MFC set to  0.000000
9/7/2010	11:46:58 PM	PHl3 MFC set to  0.000000
9/7/2010	11:46:58 PM	SiCl4 MFC set to  0.000000
9/7/2010	11:46:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:46:58 PM	Tube furnace set to 750
9/7/2010	11:51:58 PM	H2 valve closed
9/7/2010	11:51:58 PM	BCl3 valve closed
9/7/2010	11:51:58 PM	PH3 valve closed
9/7/2010	11:51:58 PM	SiCl4 pre valve closed
9/7/2010	11:51:58 PM	SiCl4 post valve closed
9/7/2010	11:51:58 PM	Main Vac valve closed
9/7/2010	11:51:58 PM	Bypass valve closed
9/7/2010	11:51:58 PM	Helium valve opened
9/7/2010	11:51:58 PM	Bubbler valve opened
9/7/2010	11:51:58 PM	Helium MFC set to  500.000000
9/7/2010	11:51:58 PM	H2 MFC set to  0.000000
9/7/2010	11:51:58 PM	BCl3 MFC set to  0.000000
9/7/2010	11:51:58 PM	PHl3 MFC set to  0.000000
9/7/2010	11:51:58 PM	SiCl4 MFC set to  0.000000
9/7/2010	11:51:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:51:58 PM	Tube furnace set to 700
9/7/2010	11:56:58 PM	H2 valve closed
9/7/2010	11:56:58 PM	BCl3 valve closed
9/7/2010	11:56:58 PM	PH3 valve closed
9/7/2010	11:56:58 PM	SiCl4 pre valve closed
9/7/2010	11:56:58 PM	SiCl4 post valve closed
9/7/2010	11:56:58 PM	Main Vac valve closed
9/7/2010	11:56:58 PM	Bypass valve closed
9/7/2010	11:56:58 PM	Helium valve opened
9/7/2010	11:56:58 PM	Bubbler valve opened
9/7/2010	11:56:58 PM	Helium MFC set to  500.000000
9/7/2010	11:56:58 PM	H2 MFC set to  0.000000
9/7/2010	11:56:58 PM	BCl3 MFC set to  0.000000
9/7/2010	11:56:58 PM	PHl3 MFC set to  0.000000
9/7/2010	11:56:58 PM	SiCl4 MFC set to  0.000000
9/7/2010	11:56:58 PM	Bypass solenoid MFC set to  0.000000
9/7/2010	11:56:58 PM	Tube furnace set to 0
